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Excimer Micro Processing System
Model Name
LPD-EK500
Series
Semiconductor
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LASER & PHYSICS

Laser Module manufacturer, Eximer Laser, Semi Conductor, Display, PCB, EMC

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Manufacturer
LASER & PHYSICS
Product Type
Machine
Brand
-
SKU
126984
Product Name
Excimer Micro Processing System
Model Name
LPD-EK500
Size
-
Weight
-
Product Details

Products Detail

- KrF (ArF) Excimer Laser

- High precision optics, X-Y-Z stage



Products Introduction

Model    LPD-EK500 
Laser type    KrF (ArF)
Wave length   248 mm (193 nm)
Average power   10 W
Pulse energy   10 mJ @ 1000 Hz
Pulse width   10 ~ 25 nsec
Pulse stability   ±3 %
Cooling    water 
X-Y stroke   500 mm x 500 mm
Accuracy   ±4 ㎛
Repeatability   ±2 ㎛
Dimension   1750 mm(W) x 1500 mm(D) x 1850 mm(H)


- High precision micro processing system by excimer laser

- High power stability by new gas circulation system

- User friendly GUI with touch screen

- Drilling, Patterning etc



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LASER & PHYSICS
LASER & PHYSICS
Laser Module manufacturer, Eximer Laser, Semi Conductor, Display, PCB, EMC
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