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Baking Furnace (Double-sided Heater type)
Heat zone | 650 x 650 x 600H ※Can be changed according to consumer needs |
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Max temp | 1500℃ ∼ 2900℃ |
Degree of vacuum | Around 10(-2) torr ※When attaching a diffusion pump, around 10(-5) torr |
Used Gas | H2, N2, Ar, HCl, Cl2 |
Utility | Power 90KVA, Cooling water, Process Gas, Air |
Optional items |
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