Green Sheet Via Hole Inspection System is an optical vision inspection system intended for total inspection on accuracy of via punching and residual foreign material defects after via punching of ceramic green sheet. The main functions of 2D μSCAN 1000 is to measure size, shape and position of via hole and size and position of residual foreign material, to determine good and no good, and to record measurement values. It has auxiliary functions to review defects and read bar code printed on sheets.