product Image
Mask Aligner
Model Name
MDA-400M
Series
-
Data
-
Manufacturer information
provider logo
MIDAS SYSTEM

Mask aligner and Spin coater equipment manufacturer

Problem with product info?
Update request
Manufacturer
MIDAS SYSTEM
Product Type
Machine
Brand
-
SKU
82198
Product Name
Mask Aligner
Model Name
MDA-400M
Size
-
Weight
-
Product Details

Easy operation & Installation
Handling Substrates of Various sizes
PLC control with Touch screen panel

specification

Type Fully manual (Mask Aligner)
Mask size up to 5" x 5"
Substrate size piece to 4" dia
UV lamp & Power 350W & power supply
Uniform beam size 4.25" x 4.25"
Beam Uniformity <±3%
Beam wavelength 350 ~ 450nm
365nm Intensity ~30mW/cm2
Alignment accuracy 1um
Process resolution 1um@1um PR thickness with vacuum contact
Process mode Soft, Hard, Vacuum contact & Proximity
Substrate chuck moving x,y,z & θ
Options Anti-Vibration table
UV Intensity meter
etc.
More products
Spin Coater
Spin CoaterSpin-5000A, 7000A
Spin Coater
Spin CoaterSpin-3000D
Mask Aligner
Mask AlignerMDA-12SA
Mask Aligner
Mask AlignerMDA-150 (M)
Spin Coater
Spin CoaterSPIN-4000A
Mask Aligner
Mask AlignerMDA-400S (MDA-400M-6)
Mask Aligner
Mask AlignerMDA-600S
Spin Coater
Spin CoaterSpin-3000T
Spin Coater
Spin CoaterSpin-1200T
Spin Coater
Spin CoaterSpin-3000A
Spin Coater
Spin CoaterSpin-1200D
Mask Aligner
Mask AlignerMDA-400LJ
Mask Aligner
Mask AlignerMDA-12FA
Mask Aligner
Mask AlignerMDA-80FA
Mask Aligner
Mask AlignerMDA-80SA
Mask Aligner
Mask AlignerMDA-80MS
MIDAS SYSTEM
MIDAS SYSTEM
Mask aligner and Spin coater equipment manufacturer
Inquiry