Mask Aligner MDA-600S by MIDAS SYSTEM - Komachine Supplier Profile and Product List

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This product is manufactured by

MIDAS SYSTEM

This product is manufactured by

MIDAS SYSTEM

Mask Aligner

Model Name

MDA-600S

Series

Data

Manufacturer information

Mask aligner and Spin coater equipment manufacturer

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Manufacturer

MIDAS SYSTEM

Product Type

Machine

Brand

SKU

82200

Product Name

Mask Aligner

Model Name

MDA-600S

Size

Weight

Product Details

Easy operation & Installation
PC Operation with PLC control
Compact size semi auto system
Image grab & Data log
More than 100 Program recipes

specification

Type	PC control semi auto
Mask size	up to 7" x 7"
Substrate size	piece to 6"
UV lamp & Power	350W & power supply
Uniform beam size	6.25" x 6.25"
Beam Uniformity	<±4%
Beam wavelength	350 ~ 450nm
365nm Intensity	~25mW/cm2
Alignment accuracy	1um
Process resolution	0.8um@1um PR thickness with vacuum contact
Process mode	Soft, Hard, Vacuum contact & Proximity
Substrate chuck moving	x,y,z & θ
Options	Anti-Vibration table
	CCD BSA
	UV Intensity meter
	UV-LED(365nm) exposure module
	etc.