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Mask Aligner
Model Name
MDA-600S
Series
-
Data
-
Manufacturer information
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MIDAS SYSTEM

Mask aligner and Spin coater equipment manufacturer

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Manufacturer
MIDAS SYSTEM
Brand
-
SKU
82200
Product Name
Mask Aligner
Model Name
MDA-600S
Size
-
Weight
-
Product Details

Easy operation & Installation
PC Operation with PLC control
Compact size semi auto system
Image grab & Data log
More than 100 Program recipes

specification

Type PC control semi auto
Mask size up to 7" x 7"
Substrate size piece to 6"
UV lamp & Power 350W & power supply
Uniform beam size 6.25" x 6.25"
Beam Uniformity <±4%
Beam wavelength 350 ~ 450nm
365nm Intensity ~25mW/cm2
Alignment accuracy 1um
Process resolution 0.8um@1um PR thickness with vacuum contact
Process mode Soft, Hard, Vacuum contact & Proximity
Substrate chuck moving x,y,z & θ
Options Anti-Vibration table
CCD BSA
UV Intensity meter
UV-LED(365nm) exposure module
etc.
MIDAS SYSTEMMask aligner and Spin coater equipment manufacturer
MIDAS SYSTEM develops and produces Mask Aligner and Spin Coater equipment required by laboratories and companies related semi-conductor, MEMS, Bio element and Nano Technologies. As for the mask aligner for wafer, we led the first development and commercialization in Korea, and continued to make up for the technologies in order to strengthen the basis as a technology centered company. Also the mask aligner for wafer is applicable for various fields and at present utilized in board fields such as the research and production of semi conductor, the research on the MEMS process and the production from MEMS applications, researched on bio chips and Nano technologies. Midas System Produces and supplies the Mask aligner based on customized design to fit to demanded applications from domestic companies and research institutes, and also provides the related equipment necessary for process of semi conductor, in terms of considering conveniences of customers. For all our customers, all our employees and managers at Midas System will do our best to become a world best company based on the confidence to produce more applicable and more efficient product for your researches and production.
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