Mask Aligner MDA-400S (MDA-400M-6) by MIDAS SYSTEM - Komachine Supplier Profile and Product List

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This product is manufactured by

MIDAS SYSTEM

This product is manufactured by

MIDAS SYSTEM

Mask Aligner

Model Name

MDA-400S (MDA-400M-6)

Series

Data

Manufacturer information

Mask aligner and Spin coater equipment manufacturer

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Manufacturer

MIDAS SYSTEM

Product Type

Machine

Brand

SKU

82199

Product Name

Mask Aligner

Model Name

MDA-400S (MDA-400M-6)

Size

Weight

Product Details

Easy operation & Installation
Handling Substrates of Various sizes
PLC control with Touch screen panel

specification

Type	PC / PLC control Manual (Mask Aligner)
Mask size	up to 7" x 7"
Substrate size	piece to 6"
UV lamp & Power	350W & power supply
Uniform beam size	6.25" x 6.25"
Beam Uniformity	<±3%
Beam wavelength	350 ~ 450nm
365nm Intensity	~25mW/cm2
Alignment accuracy	1um
Process resolution	1um@1um PR thickness with vacuum contact
Process mode	Soft, Hard, Vacuum contact & Proximity
Substrate chuck moving	x,y,z & θ
Options	Anti-Vibration table
	IR BSA
	UV Intensity meter
	etc.