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Mask Aligner
Model Name
MDA-400LJ
Series
-
Data
-
Manufacturer information
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MIDAS SYSTEM

Mask aligner and Spin coater equipment manufacturer

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Manufacturer
MIDAS SYSTEM
Product Type
Machine
Brand
-
SKU
82197
Product Name
Mask Aligner
Model Name
MDA-400LJ
Size
-
Weight
-
Product Details

Easy operation & Installation
Handling Substrates of Various sizes
Adopt UV-LED exposure module
UV-LED Life-time is long

specification

Type Fully manual (Mask Aligner)
Mask size up to 5" x 5"
Substrate size piece to 4" dia
UV lamp & Power UV-LED & power supply
Uniform beam size 125mm dia
Beam Uniformity <±3%
Beam wavelength 365nm Only
365nm Intensity ~20mW/cm2
Alignment accuracy 1um
Process resolution 1um@1um PR thickness with vacuum contact
Process mode Soft, Hard, Vacuum contact & Proximity
Substrate chuck moving x,y,z & θ
Options etc.
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MIDAS SYSTEM
MIDAS SYSTEM
Mask aligner and Spin coater equipment manufacturer
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