Chat with us, powered by LiveChat OLED R&D Series | Korea Vacuum Tech - Komachine
Product Name
Model OLED R&D Series
Series Evaporator
Catalog
Product Description

Korea Vacuum Tech  OLED R&D Series

Overview

KVT has developed the evaporator system with high precision deposition rate control

and unique design & technology. KVE series is designed and manufactured to

deposition equipment with variable item. KVE-TG Series is consisted of deposition

system with glove box system. These systems can prevent the oxidation of sample from external air.

If you use the mask when you deposit the thin film, you can make the device without venting the chamber.

Also if you enter the deposition condition to recipe, you will always get the thin film of same characteristic.

 

Features

≻ Mixing source

The system has multi thermal source. It can use the organic source with the metal source. Also can be possible that is co-deposition.

≻ Multi-Layer Deposition

Multiple source assemblies provide for sequential multi-layer or complex alloy deposition In Situ.

≻ Make the complete sample at once.

The system has the mask changer. So you can get the complete sample without venting the chamber. It has advantage that reduce the chamber pumping time and prevent the oxidation of sample.

Specifications

ITEM

Specifications

Process Chamber

Stainless steel

Vacuum Pumping Station

TMP / Cryo pump

Loadlock Chamber

Glove box intergrated

Substrate Unit

Rotation / Heating / Cooling

Sample Size

4” or more

Power Supply Unit

10V,300A / 10V,100A

Source Type & Number

Boat, Crucible / Two or more

Process Control Type

Auto

Film Thickness Uniformity

< ±5%

Ultimate Pressure

< 5.0E-7Torr

Korea Vacuum Tech  OLED R&D Series 1

Korea Vacuum Tech  OLED R&D Series 2

Overview

KVT has developed the evaporator system with high precision deposition rate control

and unique design & technology. KVE series is designed and manufactured to

deposition equipment with variable item. KVE-TG Series is consisted of deposition

system with glove box system. These systems can prevent the oxidation of sample from external air.

If you use the mask when you deposit the thin film, you can make the device without venting the chamber.

Also if you enter the deposition condition to recipe, you will always get the thin film of same characteristic.

 

Features

≻ Easy sample loading

The system is installed in an expanded form of the process chamber which placed above the main process chamber. Therefore it doesn’t need the loading arm. So you can make a sample loading very simply.

≻ Prevent the oxidation of sample

When the sample is taken out of the chamber, it is immediately connected to the glove box, protecting the sample from oxidation.

Specifications

ITEM

Specifications

Process Chamber

Stainless steel

Vacuum Pumping Station

TMP / Cryo pump

Loadlock Chamber

N/A

Substrate Unit

Rotation / Heating / Cooling / Tilt

Sample Size

4” or more

Power Supply Unit

10V,300A / 10V,100A

Source Type & Number

Boat, Crucible / Two or more

Process Control Type

DC, Auto

Film Thickness Uniformity

< ±5%

Ultimate Pressure

< 5.0E-7Torr

Korea Vacuum Tech  OLED R&D Series 3

Korea Vacuum Tech  OLED R&D Series 4

Overview

KVT has developed the evaporator system with high precision deposition rate control

and unique design & technology. KVE series is designed and manufactured to

deposition equipment with variable item. KVE-TG Series is consisted of deposition

system with glove box system. These systems can prevent the oxidation of sample from external air.

If you use the mask when you deposit the thin film, you can make the device without venting the chamber.

Also if you enter the deposition condition to recipe, you will always get the thin film of same characteristic.

 

Features

≻ Easy sample loading

The system is installed in an expanded form of the process chamber which placed above the main process chamber. Therefore it doesn’t need the loading arm. So you can make a sample loading very simply.

≻ Prevent the oxidation of sample

When the sample is taken out of the chamber, it is immediately connected to the glove box, protecting the sample from oxidation.

Specifications

ITEM

Specifications

Process Chamber

Stainless steel

Vacuum Pumping Station

TMP / Cryo pump

Loadlock Chamber

Glove box intergrated

Substrate Unit

Rotation / Heating

Sample Size

4” or more

Power Supply Unit

10V,300A / 10V,100A

Source Type & Number

Boat, Crucible / Two or more

Process Control Type

PLC Semi-auto

Film Thickness Uniformity

< ±5%

Ultimate Pressure

< 5.0E-7Torr

Korea Vacuum Tech  OLED R&D Series 5

Korea Vacuum Tech  OLED R&D Series 6

Overview

KVT has developed the evaporator system with high precision deposition rate control

and unique design & technology. KVE series is designed and manufactured to

deposition equipment with variable item. KVE-TG Series is consisted of deposition

system with glove box system. These systems can prevent the oxidation of sample from external air.

If you use the mask when you deposit the thin film, you can make the device without venting the chamber.

Also if you enter the deposition condition to recipe, you will always get the thin film of same characteristic.

 

Features

≻ Easy sample loading

The system is installed in an expanded form of the process chamber which placed above the main process chamber. Therefore it doesn’t need the loading arm. So you can make a sample loading very simply.

≻ Prevent the oxidation of sample

When the sample is taken out of the chamber, it is immediately connected to the glove box, protecting the sample from oxidation.

Specifications

ITEM

Specifications

Process Chamber1

Stainless steel

Vacuum Pumping Station

TMP / Cryo pump

Process Chamber2

Glove box intergrated

Substrate Unit

Rotation / Heating

Sample Size

4” or more

Power Supply Unit

10V,300A / 10V,100A

Source Type & Number

Boat, Crucible / Two or more

Process Control Type

PLC Semi-auto

Film Thickness Uniformity

< ±5%

Ultimate Pressure

< 5.0E-7Torr

Korea Vacuum Tech  OLED R&D Series 7

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