Search

Korea Vacuum Tech

Korea Vacuum Tech

Korea Vacuum Tech

Korea Vacuum Tech

HomeManufacturersKorea Vacuum Tech
1/1
Korea Vacuum Tech

Korea Vacuum Tech

Bench Top

Model

Series

Bench Top


Transaction Process

Please contact the manufacturer/supplier.

Payment

Contact the manufacturer/supplier.

Delivery

Contact the manufacturer/supplier.

Shipment

Contact the manufacturer/supplier.

Origin

Contact the manufacturer/supplier.


Description

Korea Vacuum Tech, Ltd. proudly introduces the latest

addition to our family of products, the Intelsi-R Series ‘Bench Top’ RTP

system, which puts the annealing process into a compact size.

Designed to process samples up to 2” (50.8mm) wafer size in various

gas environments using precise digital display readout and full

computer control, the Intelsi-R Series can be conveniently configured,

is simple to operate and easy to maintain.The modular design of the Intelsi-M

makes it highly configurable to meet specific customer needs and numerous

stock options are also available. A fully automated Laptop PC helps round out

this extremely usable yet robust diminutive package.

Advantages

≻ Easy to install, easy to operate

≻ Precise reproducible coatings - consistent

≻ Compact design / small footprint

≻ Quick and simple loading / unloading

Features

≻ Rapid Heating: 100℃/sec (212℉/sec)

≻ Extreme versatility

≻ High capacity vacuum pumping

≻ Fully automated PC control

≻ Capable of producing very thin resultant films

 

Applications

≻ Annealing after ion implantation

≻ III -V semiconductor

≻ Damage recovery after dry etch

≻ Silicide processing


Specifications

Process Chamber

Stainless steel

Vacuum Pumping Station

Rotary Pump

Temperature Range

100℃ ~ 1000℃ (212℉ ~ 1832℉)

Temperature uniformity

Less than <± 5℃ (41℉) for 50.8mm (2”) wafer

Heating element

Quartz Lamp

Ultimate Pressure

Less than 5.0E-3Torr

626mm(W) x 520mm(D) x 475mm(H) - 24.5”(W) x 20.5” (D) x 18.75” (H)


Korea Vacuum Tech  Bench Top RTP Series

Inquiry

Komachine Inc.
Head Office:
Ace Dongbaek Tower 1-1101, 16-4,
Dongbaekjungang-ro 16beon-gil, Giheung-gu,
Yongin City, Gyeonggido, South Korea 17015
Branch Office:
606, Seoul Stratup Center, 10,
Noryangjin-ro, Dongjak-gu, Seoul, South Korea 06938
CEOCharlie Park
Corporate #535-86-00664

ⓒ2024 Komachine Inc. All rights reserved.