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Gen. 5.5 XYT Planar Air Bearing Stage
Model Name
-
Series
Motion Stages
Data
-
Manufacturer information
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JustekLinear motor, Stage, Servo driver, Rotary DD motor, Multi controller, High precision motion stag and more
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Manufacturer
Justek
Brand
-
SKU
55471
Product Name
Gen. 5.5 XYT Planar Air Bearing Stage
Model Name
-
Size
-
Weight
-
Product Details

Specification

Axis

X₁, X₂

Y

Work area

800mm

920mm

Guide

Air bearing

Load mass

200kg/T axis

Speed

0.5m/sec

Acceleration

1m/sec²

Position accuracy (보정후)

2㎛

Repeatability

±1㎛

Straightness

6㎛

-

Speed ​​ripple

0.1%, at 0.1m/sec

T axis

Ball screw & R guide ±3degree

Applications

Laser processing, LCD pattern inspection

JustekLinear motor, Stage, Servo driver, Rotary DD motor, Multi controller, High precision motion stag and more
Ever since starting business from manufacturing linear motors in 1999, Justek has contributed to the growth of Electronic Component industry by developing key components and devices for precision motion control essential to produce production equipment for semiconductors and FPD(Flat Panel Display) including rotary direct drive motors, servo drivers, multi-axis controller, and high precision motion stages. In accordance with the customers’ demands for high speed and high precision, Justek pursues completeness in direct-drive technology in linear and rotary motions. Based on expertise and experiences acquired during the last decade, Justek focuses on developing the state-of-the-art technologies for direct drive motion control to keep the technological leadership in the global market. Justek also pursues better customer satisfaction through the close partnership. Justek strongly supports collaborative engineering with customers in developing new products and application systems.
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