product Image
product Image

TOP

Single Thermal LPCVD System
Model Name
BlueJay™ / BlueJay-e™
Data
-
Manufacturer information
provider logo
EUGENE TECHSemi conductor equipment manufacturer, Blue jay system, Poly silicon thin film and more
Problem with product info?
Update request
Manufacturer
EUGENE TECH
Brand
-
SKU
10923
Product Name
Single Thermal LPCVD System
Model Name
BlueJay™ / BlueJay-e™
Size
-
Weight
-
Product Details

The BlueJay™ : Temperature uniformity control and tunable process gas flow in our multi-chamber, single wafer platform offer unique process flexibility, excellent film thickness uniformity and repeatability, lower thermal budgets and ease of tool matching.

 

The BlueJay-e™ : Next generation, compact version offering the same process advantages with a smaller footprint and lower CoO

 

Key Features

- Independent Dual Zone Temperature Control for Better Film Uniformity

- Up to 800°C Process Capability 

- High Throughput 

- Optimized Design Based on the Computational Flow Dynamics (CFD)

- Flexible Gas Panel Configuration

- Centralized Architecture Using Device Net Protocol

 

Benefits

- Excellent Thickness Uniformity & Reproducibility

- Lower Thermal Budget vs. Traditional Batch Furnaces

- Lower Particle Generation via In-situ Dry Cleaning

- Multiple Applications with Versatile Gas Options

- Industry Standard Tool with Production-proven Platform

 

Applications

EUGENE TECH Single Thermal LPCVD System BlueJay™ / BlueJay-e™

EUGENE TECHSemi conductor equipment manufacturer, Blue jay system, Poly silicon thin film and more
EUGENE TECHNOLOGY CO., LTD provides innovative solutions that enable continued scaling of key semiconductor manufacturing processes while traditional semiconductor equipment makers face increasing limitations in the emerging nano technology era.   EUGENE TECHNOLOGY, starting with novel 'Nitride' processes, and soon adding Poly and Oxide steps, became the only company providing 'Single Wafer' diffusion solutions. Our flagship product line, the 'Blue Jay System' has been in volume production on core Front End of Line (FEOL) processes at leading global for 5 years, meeting stringent quality, technology, and productivity requirements. We are also investing heavily in advanced research and development (R&D) to continually expand our 'Diffusion Solution Provider' product offerings.   Launched with our own proprietary technology, we have grown rapidly to become a KOSDAQ-listed company in only 6 years. By following our own unique path, we've built the EUGENE TECHNOLOGY of today on the strength of our employee's conviction and dedication, focus on quality, competence in R&D, and an in depth understanding of industry technology trends.   As a dynamic, young, and growing company, we'll continue to move towards our vision to become a Top 10 global equipment company by expanding our market share aggressively in 2017-8.   EUGENE TECHNOLOGY is committed to pursuing semiconductor industry development with our leading technology, great partnerships with our customers, suppliers, and investors, and with the determination of our people.
Inquiry