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Plasma Enhanced ALD System
Model Name
Phoenix ™
Data
-
Manufacturer information
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EUGENE TECHSemi conductor equipment manufacturer, Blue jay system, Poly silicon thin film and more
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Manufacturer
EUGENE TECH
Brand
-
SKU
10889
Product Name
Plasma Enhanced ALD System
Model Name
Phoenix ™
Size
-
Weight
-
Product Details

The Phoenix™: Unique chamber design, with laminar flow capability and excellent plasma uniformity enables deposition of high quality films for challenging applications. Plasma Enhanced ALD system provides the superior film quality using Eugene Technology’s patented Super Cycle Densification Technology.

 

Key Features

- Deposition Temperature Range: 50~550°C

- Patented Plasma Densification Process

- Compact Twin Chamber Configuration with Laminar Flow

- Square Type Chamber, CCP Design

- Wafer Rotation for Various Thickness Map ; Flat, Convex, Concave


Benefits

- High Throughput: Four (4), Twin Chamber Process Modules
- Excellent Step Coverage and Minimized Loading Effect
- Excellent Thickness Uniformity and Repeatability 
- Wet Etch Rate Control
- High Density Film Quality at Low Temperature
- Good Electrical Characteristics and Low Wet Etch Properties


Applications

EUGENE TECH Plasma Enhanced ALD System Phoenix ™

EUGENE TECHSemi conductor equipment manufacturer, Blue jay system, Poly silicon thin film and more
EUGENE TECHNOLOGY CO., LTD provides innovative solutions that enable continued scaling of key semiconductor manufacturing processes while traditional semiconductor equipment makers face increasing limitations in the emerging nano technology era.   EUGENE TECHNOLOGY, starting with novel 'Nitride' processes, and soon adding Poly and Oxide steps, became the only company providing 'Single Wafer' diffusion solutions. Our flagship product line, the 'Blue Jay System' has been in volume production on core Front End of Line (FEOL) processes at leading global for 5 years, meeting stringent quality, technology, and productivity requirements. We are also investing heavily in advanced research and development (R&D) to continually expand our 'Diffusion Solution Provider' product offerings.   Launched with our own proprietary technology, we have grown rapidly to become a KOSDAQ-listed company in only 6 years. By following our own unique path, we've built the EUGENE TECHNOLOGY of today on the strength of our employee's conviction and dedication, focus on quality, competence in R&D, and an in depth understanding of industry technology trends.   As a dynamic, young, and growing company, we'll continue to move towards our vision to become a Top 10 global equipment company by expanding our market share aggressively in 2017-8.   EUGENE TECHNOLOGY is committed to pursuing semiconductor industry development with our leading technology, great partnerships with our customers, suppliers, and investors, and with the determination of our people.
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