MFC Contorller, Convection Gauge & Controller, lon Gauge & Controller, Capacitance Manometer, Throttle Valve Controller
AFC700 HIGH MASS FLOW CONTROLLER (Viton , Kalrez Seal)
MFC는 Mass Flow Controller의 약자로서 Gas Bottle에서 나오는 Gas를 유저가 원하는 일정한 유량의 값으로 흐르게 하기 위한 장치입니다. 단위로는 제조회사마다 약간의 차이를 보이지만 일반적으로 SCCM(Standard Cubic Centimeter per Minutes)을 사용합니다.
Features & Benefits
■ AFC770(HIGH Mass Flow Controller)는 일반적으로 산업용을 포함하여 반도체고정에도 사용할수 있도록 설계되어 있습니다.
■ AFC770(HIGH Mass Flow Controller)는 Full Scale Range 는 51 SLM ~ 500 SLM 입니다.
■ AFC770(HIGH Mass Flow Controller)는 Full Scale 1%에 해당하는 오차를 가지고 있습니다.
■ AFC770(HIGH Mass Flow Controller)는 Warm-up 시간이 거이 필요하지 않는 제품으로 설계되어 있습니다.
■ AFC770(HIGH Mass Flow Controller)는 기본적으로 9Pin D-sub Connector를 사용합니다.
■ AFC770(HIGH Mass Flow Controller)는 GMC1200과 같은 MFC Power Supply & Display Unit와 함께 사용할 수 있습니다.
Dimensions
Fitting | "A" (mm) |
1/4" LOK | 136 |
3/8" LOK | 136 |
1/2" LOK | 136 |
1/4" VCR | 149.4 |
1/4" VCR | 149.4 |
PIN ASSIGNMENT (D-SUB 9Pin Male)
PIN | DESCRIPTION | PIN | DESCRIPTION |
1. | - | 6. | Set Point Input |
2. | Flow Signal Output | 7. | Signal Ground |
3. | +15 VDC | 8. | RS485_TX(+) |
4. | Power Ground | 9. | RS485_RX(-) |
5. | -15 VDC | | - |
Specifications
Full S cale Ranges (N2 equivalent) | 51 SLM~ 500 SLM |
Maximum lnlet P ressure | 150 psig |
Normal Operating Pressure Differential (with atmospheric pressure at the. MFCoutlet) | 45 to 75 psid |
Control Range | 2% to 100% of F.S |
Accuracy (analog) (including non-linearity, hysteresis, and non-repeata bility referenced to 760mmhg and 0°c) | ±1.0% of F.S
|
Repeatability | ±0.2% of F.S |
Resolution | 1.0% of F.S |
Temperature Coefficients Zero Span | <0.05 % of F.S./°C <0.05 % of F.S. |
Warm-up Time (to within 0.2% of F.S. of steady state performance) | < 2 min |
Controller Settling Time | < 2 sec |
Pressure Coefficient | <0.02 % of Rdg./psi |
Normal Operating Temperature Range | 0°C to 50°C |
Input Voltage Required Max. current at start-up (first 2 sec) Typical current at seady state |
±15 VDC(±5%) @ 200 mA +13~30VDC(±5%) @ 300 mA (Option) |
Set Point Command Signal | 0 to 5 VDC (Option 4~20 mA) |
Output Signal | 0 to 5 VDC (Option 4~20 mA) |
Connector Types Analog | 9-pin "D" Type |
REMOTE MODE | RS485 , RS232 |
Wetted Materials Stan dard Optional (seals and valve seat) | 316L S.S. , Vition , Kalrez |
Leak Integrity External (scc/sec He) Through closed valve | <1 x 10(-9) <1.0% of F.S. at 40 psig inlet to atmosphere(Toassure no flow-through, a separate positives shut-off valve is recommended.) |
Fittings (compatible with) | Swagelok 2 VCR, 1/2" Swagelok |
