
Korea Vacuum Tech
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Korea Vacuum Tech Co. LTD is a specialized company in the development of vacuum system for semiconductor device fabrication.
KVT has researched many plasma related studies.
The main products are vacuum deposition systems (PVD,CVD), etcher, cleaning systems for R & D and device mass production, thermal process and customized vacuum systems.
KVT has produced vacuum systems for faster and more convenient process, and especially fully automated systems has been developed for device mass production. We have enhanced export to US, Japan, and have got good reputation about quality.
Also KVT has KA A9001/ISO 9001/EN ISO 9001 related design, development, production, and service.
+82-31-987-6320
+82-31-987-9149
200, Goyang-ro 117beon-gil Wolgot-myeon, Gimpo-si, Gyeonggi-do, Korea
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Intelsi-L Series
Intelsi-M Series
E-BEAM Series
Thermal Series
E-beam & Thermal Series
iBAD Series
OLED R&D Series
E-beam & Sputter Series
KVS-2000 Series
KVS-4000 Series
KVS-5000 Series
KVIS-Series
KVR-2000 Series
KVR-4000 Series
KVR-6000 Series
KVP-2000 Seires
PECVD Series
Thermal CVD Series
PEALD
ALD-CVD Series
ICP-RIE Series
RIE Series
Ion Milling Series
Vacuum Dryer for LiB
Bench Top Sputter Series
Bench Top RTP Series