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HORIBA

HORIBA

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HORIBA

HORIBA

Compact VUV CCD Spectrometer

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Most Compact Vacuum UV Back-Illuminated CCD Spectrometer (VUV-FUV)

Horiba has developed a compact size Vacuum Ultraviolet (VUV) Spectrometer with a dedicated CCD Camera Syncerity-VUV, all manufactured in its NJ facility. This unique system features a special CCD sensor with high sensitivity in the  far-UV wavelength range with capability to measure from 115 nm with a resolution better than 0.5 nm under vacuum or high purity nitrogen. The system’s internal optical cavity can be black coated for ultimate suppression of stray light.

 

For OEM VUV Industrial Applications

ㆍ VUV Emission & Fluorescence 
ㆍ VUV Transmission & Reflectance
ㆍ GCVUV: Alternative to Conventional Gas Chromatography
ㆍ Examples :
     - Metrology
     - Photolithography
     - Petrology
     - Environmental Monitoring
     - Flavors & Fragrances
     - Food & Beverage Safety

 

ㆍ First portable and most affordable VUV spectrometer
ㆍ Smallest VUV system footprint on the market
ㆍ Ultra high throughput combined with unmatched low stray light performance
ㆍ High resolution of 0.5 nm Selectable resolution and throughput
ㆍ Deep-cooled CCD with high quantum efficiency
ㆍ Extendable wavelength coverage from Far UV to UV-VIS-NIR

 

CCD Quantum Efficiency

UV hardened sensor provides increased lifetime, however no warranty is provided on any sensor exposed to VUV

 

Stray Light Comparison

Stray light comparison between uncoated and coated cavity (Super Black)  measured by far field illumination using tungsten lamp – zero order

 

Spectrum of Deuterium

Spectrum of Deuterium lamp shows enhanced sensitivity starting from 113 nm with 22 µm slit (0.45 nm resolution)

 

VUV System Slit Interchangeability Test

VUV system slit interchangeability test with 40 µm pinhole and 22 µm slit

 

OEM Spectrometer Selection Guide

 

General Spectrometer Specifications

Spectral Coverage 115 - 230 nm Full coverage on CCD: 115 - 320 nm (No order sorting filter available)
Spectral Resolution  0.5 nm with 22 μm pinhole, 0.75 nm with 40 μm pinhole
Spectral Dipersion 12 nm/mm; 0.17 nm/pixel
Focal Length  90 mm
VUV Optics MgF2 coated grating and mirror
Vacuum or Nitrogen Purged Mode ~ 10-6 Torr with turbomolecular pump. Helium leak test performed at factory.
N2 high purity nitrogen constant purge required
Options
 
Selection of different heights of VUV CCDs
Kinematic mounts to interchange Pinholes (or Slits)
Bare metal finish is standard: Super black coating reduces stray light
F/#  ~ F/10
Software LabVIEW Acquisition sortware for initial evaluation (DLLs provided for software integration)

 

 

Vacuum Camera Specifications (Syncerity® VUV 2048 pixel BI Sensor)*
Quantum efficiency at 20°C (see plots below) Standard Special
CCD Sensor Format 2048 x 70 Optional increased heights available
CCD Pixel Size 14 x14 μm
CCD Height 1 mm
CCD QE 3 options - refer to graphs below
Camera Window 2 options - no window for lowest VUV response or MgF2 window
Deep Thermoelectric Cooling -45°C under vacuum (10-6 mbar) with +25°C ambient or -25°C under N2 purging
Single Pixel Well Capacity 50,000 e¯/pixel (minimum); 60,000 e¯/pixel (typical)
Serial Register Full Well Capacity 250,000 e¯/pixel (minimum); 500,000 e¯/pixel (typical output register saturation)
Scan Rates 45 kHz and 500 kHz
Readout Noise (at 45 kHz and at –45°C) 10 e¯ (typical) to 14 e¯ (maximum)
Readout Noise (at 500 kHz and at –45°C) 20 e¯ (typical) to 25 e¯ (maximum)
Maximum Spectral Rate 20 Hz at 45 kHz scan rate; 189 Hz at 500 kHz scan rate
Digitization 16-bit ADC
Dynamic Range (typical for single pixel) 55,500:1
Non-linearity (measured on each camera) <0.15% (typical) at 45 kHz (0.4% maximum)
<0.20% (typical) at 500 kHz (1% maximum)
Dark Current at –45°C
Note: Pixel size = 14 μm
0.1 e¯ /pixel/s (typical)
Software-adjustable Gains 2, 4, and 10 e¯ /count at –45°C
Environmental Conditions Operating temperature 15°C to 40°C ambient
Relative humidity <70% (non-condensing)
Storage temperature -25°C to 45°C
Power Requirements
AC/DC Power Supply (provided)
90-264 VAC, 47–63 Hz

 

*Specifications, form factor, and spectrometer cover subject to change without notice. No LabVIEW™ license is needed to run our acquisition software.

 

CCD Quantum Efficiency

UV hardened sensor provides increased lifetime, however no warranty is provided on any sensor exposed to VUV

 

Mechanical Drawings

자료 다운로드

Catalog-Horiba-Compact VUV CCD Spectrometer-VU90

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