분광기, 분광 시스템, 그레이팅, 회절격자, 카메라 시스템, OEM 제조업체
Most Compact Vacuum UV Back-Illuminated CCD Spectrometer (VUV-FUV)
Horiba has developed a compact size Vacuum Ultraviolet (VUV) Spectrometer with a dedicated CCD Camera Syncerity-VUV, all manufactured in its NJ facility. This unique system features a special CCD sensor with high sensitivity in the far-UV wavelength range with capability to measure from 115 nm with a resolution better than 0.5 nm under vacuum or high purity nitrogen. The system’s internal optical cavity can be black coated for ultimate suppression of stray light.
For OEM VUV Industrial Applications
ㆍ VUV Emission & Fluorescence
ㆍ VUV Transmission & Reflectance
ㆍ GCVUV: Alternative to Conventional Gas Chromatography
ㆍ Examples :
- Metrology
- Photolithography
- Petrology
- Environmental Monitoring
- Flavors & Fragrances
- Food & Beverage Safety
ㆍ First portable and most affordable VUV spectrometer
ㆍ Smallest VUV system footprint on the market
ㆍ Ultra high throughput combined with unmatched low stray light performance
ㆍ High resolution of 0.5 nm Selectable resolution and throughput
ㆍ Deep-cooled CCD with high quantum efficiency
ㆍ Extendable wavelength coverage from Far UV to UV-VIS-NIR
CCD Quantum Efficiency
UV hardened sensor provides increased lifetime, however no warranty is provided on any sensor exposed to VUV
Stray Light Comparison
Stray light comparison between uncoated and coated cavity (Super Black) measured by far field illumination using tungsten lamp – zero order
Spectrum of Deuterium
Spectrum of Deuterium lamp shows enhanced sensitivity starting from 113 nm with 22 µm slit (0.45 nm resolution)
VUV System Slit Interchangeability Test
VUV system slit interchangeability test with 40 µm pinhole and 22 µm slit
OEM Spectrometer Selection Guide
|
General Spectrometer Specifications |
|
|---|---|
| Spectral Coverage | 115 - 230 nm Full coverage on CCD: 115 - 320 nm (No order sorting filter available) |
| Spectral Resolution | 0.5 nm with 22 μm pinhole, 0.75 nm with 40 μm pinhole |
| Spectral Dipersion | 12 nm/mm; 0.17 nm/pixel |
| Focal Length | 90 mm |
| VUV Optics | MgF2 coated grating and mirror |
| Vacuum or Nitrogen Purged Mode | ~ 10-6 Torr with turbomolecular pump. Helium leak test performed at factory. N2 high purity nitrogen constant purge required |
| Options |
Selection of different heights of VUV CCDs Kinematic mounts to interchange Pinholes (or Slits) Bare metal finish is standard: Super black coating reduces stray light |
| F/# | ~ F/10 |
| Software | LabVIEW Acquisition sortware for initial evaluation (DLLs provided for software integration) |
| Vacuum Camera Specifications (Syncerity® VUV 2048 pixel BI Sensor)* | ||
|---|---|---|
| Quantum efficiency at 20°C (see plots below) | Standard | Special |
| CCD Sensor Format | 2048 x 70 | Optional increased heights available |
| CCD Pixel Size | 14 x14 μm | |
| CCD Height | 1 mm | |
| CCD QE | 3 options - refer to graphs below | |
| Camera Window | 2 options - no window for lowest VUV response or MgF2 window | |
| Deep Thermoelectric Cooling | -45°C under vacuum (10-6 mbar) with +25°C ambient or -25°C under N2 purging | |
| Single Pixel Well Capacity | 50,000 e¯/pixel (minimum); 60,000 e¯/pixel (typical) | |
| Serial Register Full Well Capacity | 250,000 e¯/pixel (minimum); 500,000 e¯/pixel (typical output register saturation) | |
| Scan Rates | 45 kHz and 500 kHz | |
| Readout Noise (at 45 kHz and at –45°C) | 10 e¯ (typical) to 14 e¯ (maximum) | |
| Readout Noise (at 500 kHz and at –45°C) | 20 e¯ (typical) to 25 e¯ (maximum) | |
| Maximum Spectral Rate | 20 Hz at 45 kHz scan rate; 189 Hz at 500 kHz scan rate | |
| Digitization | 16-bit ADC | |
| Dynamic Range (typical for single pixel) | 55,500:1 | |
| Non-linearity (measured on each camera) | <0.15% (typical) at 45 kHz (0.4% maximum) | |
| <0.20% (typical) at 500 kHz (1% maximum) | ||
| Dark Current at –45°C Note: Pixel size = 14 μm |
0.1 e¯ /pixel/s (typical) | |
| Software-adjustable Gains | 2, 4, and 10 e¯ /count at –45°C | |
| Environmental Conditions | Operating temperature 15°C to 40°C ambient | |
| Relative humidity <70% (non-condensing) | ||
| Storage temperature -25°C to 45°C | ||
| Power Requirements AC/DC Power Supply (provided) |
90-264 VAC, 47–63 Hz | |
*Specifications, form factor, and spectrometer cover subject to change without notice. No LabVIEW™ license is needed to run our acquisition software.
CCD Quantum Efficiency
UV hardened sensor provides increased lifetime, however no warranty is provided on any sensor exposed to VUV
Mechanical Drawings
