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HORIBA

HORIBA

UV-Vis-NIR Spectrometers

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UV-VIS-NIR Spectrometer

OES-Star UV-VIS-NIR Spectrometer Spectral Coverage OES-Star UV-VIS-NIR Spectrometer Quantum Efficiency

Horiba’s OEM division, a major supplier of OES solutions, has developed a high end OES Spectrometer with a proprietary optical configuration for broad coverage (185-1050 nm) and high resolution. The OES-Star is available with a selection of three UV-VIS-NIR Back-Illuminated (B.I.) sensors, one TE-Cooled and two uncooled CCD detectors. This unique OES system features an optical design that provides a high peak symmetry across a very broad spectral range combined with high spectral resolution better than 1 nm, at an unmatched aperture of F/2.3.

 

For OEM Industrial Applications

ㆍ Optical Emission Spectrometry
ㆍ Reflectometry
ㆍ Process and Quality Control
ㆍ Examples :
     - Endpoint Detection
     - Plasma Monitoring
     - Semiconductor Wafer Inspection

ㆍ Optical emission spectrometry (OES)
ㆍ Unmatched long term stability and excellent wavelength accuracy
ㆍ USB2 Ethernet and EtherCAT interface
ㆍ High spectral resolution combined with high throughput
ㆍ Broad wavelength coverage from UV to NIR 
ㆍ Multiple B.I. CCD options cooled/uncooled with high dynamic range 
ㆍ CMOS sensor option with electronic shutter and ultra high spectral rate

 

Flat resolution and dispersion across the entire spectral range (185 -1050 nm) combined with excellent peak symmetry

This OES-Star is featuring a tall CCD with built in round-to-line (RTL) fiber converter to maximize light collection and therefore the system throughput. Input fiber with a core of 1 mm or smaller can be used. However to take advantage of the tall detector and RTL, larger core fibers are recommended.

 

Built-in round-to-line (RTL) converter boosts throughput when combined with a large core diameter fiber and our tall CCD (S13241-1108S)

 

Quantum Efficiency Plot

 

OEM Spectrometer Selection Guide

 

General Spectrometer Specifications*

Spectral Coverage

185 – 1050 nm (2048 horizontal pixel format with 14 µm pixel size)
200 – 1050 nm (2048 horizontal pixel format with 12 µm pixel size)

Spectrometer Input

SMA (standard), other input types available upon request

Spectral Resolution

<1 nm with 22 µm slit with very high symmetry across broad spectral range
(flexible based on customer’s need)

Average Spectral Dispersion

34.6 nm/mm, 0.484 nm/pixel (14 µm pixel size), 0.41 nm/pixel (12 µm pixel size)

Focal Length

116 mm

F/#

F/2.3 

Wavelength Accuracy

< +/- 0.1 nm

Stray Light

< 0.1%*

Software

LabVIEW™ acquisition software for initial evaluation (DLLs provided for software integration)

 

 

CCD Detector Model Cooled BI High-end CCD
with best dynamic range
(S13241-1108S)
BI CCD Middle Grade
(S14660-2048N)
BI CCD cost effective
(S11071-1106N)
CCD Sensor Format 2048 x 256 2048 x 192 2048 x 70
CCD Pixel Size 12 x 12 μm 14 x 14 μm 14 x 14 μm
Image Size 24.5 x 3.0 mm 28.6 x 2.68 mm 28.7 x 1.0 mm
CCD QE at 20°C 90% or higher at the peak High sensitivity over a
wide spectral range
> 75% for 450 - 750 nm
Deep Thermoelectric Cooling -5º C Non-cooled Non-cooled
Full Well Capacity 500,000 e¯/pixel (typical) 200,000 e¯/pixel (typical) >200,000 e¯/pixel (typical)
>175,000 e¯/pixel (minimum)
Readout Noise 50 e¯ (typical)
(@ 1.5MHz sampling)
40 e¯ (typical)
50 e¯ (maximum)
35 e¯ (typical)
45 e¯ (maximum)
Digitization 16-bit ADC 16-bit ADC 16-bit ADC
Dynamic range (FW/RN) 10000:1 5000:1 5700:1
Non-linearity
(measured on each system)
<1.8% (maximum) at low gain
<0.9% (maximum) at high gain
<0.1% (corrected) <0.1% (corrected)
Dark Current 1.5 e-/pixel/s (typical) @-5° C
15 e¯/pixel/s (maximum)
50 e¯/pixel/s (typical) @ 20° C
500 e¯/pixel/s (maximum)
50 e¯/pixel/s (typical) @ 20° C
500 e¯/pixel/s (maximum)
Environmental Conditions Operating temperature 0° C to 40° C ambient
Relative humidity <70% (non-condensing)
Storage temperature -20° C to 50° C
Power Requirements
AC/DC Power Supply (provided)
90-264 VAC, 47–63 Hz

 

*Specifications, form factor, and spectrometer cover subject to change without notice. No LabVIEW™ license is needed to run our acquisition software.

 

Mechanical Drawings

 

 

자료 다운로드

Catalog-Horiba-UV-Vis-NIR Spectrometers-OES-Star

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