



Semi conductor equipment and Vacuum equipment manufacturer, Vacuum system, Solar cell
Overview
Maximized performance due to utilization of plane optic components Able to supply photons from a significantly wide range of energy due to the limited number of gratings
Specifications
| PART | Parameter | Deflection Mirror | Grating |
| Grating & DM Rotation (Pitch axis) | Range(mrad) | 60 | |
| Resolution(μrad) | 0.1 | ||
| Grating & DM Z (Height) | Range(mm) | ±10 | |
| Resolution(µm) | 0.05 | ||
| Grating & DM Roll | Range(mrad) | ±5 | |
| Resolution(μrad) | 50 | ||
| Chamber X | Range(mm) | ±10 | |
| Resolution(µm) | 0.01 | ||
| Angle Sensor | Range(Degree) | ±0.5 | |
| Resolution(Degree) | <= 0.0001 | ||















