



Semi conductor equipment and Vacuum equipment manufacturer, Vacuum system, Solar cell
Overview
A device that spectrumizes monochromatic light from incident white synchrotron beams Equipped with high-precision motion stage for precise locating and directing of a crystal according to the change in x-ray wavelength
Specifications
| PART | ACTUATOR/MONITOR | RESOLUTION |
| Bragg Angle | Goniometer | 0.07”(Min) |
| Angle Encoder | 0.0024″ | |
| Z | Actuator | 6㎛ Max 0.03nm Min |
| Linear Encoder | 50nm | |
| Roll(2nd crystal) | Pico-Motor | 0.018” |
| LVDT | Calibration is necessary | |
| Pitch(2nd crystal) | Pico-Motor | 0.013” |
| LVDT | Calibration is necessary | |
| Fine pitch | PZT | 0.3 nrad |















