ICP-RIE PSS Etcher for HBLED

SIE 2031

ICP Etcher

SIE 601

RIE Etcher

SRE 601

Cluster Sputter with Multi Target Chamber

SCS 110

Cluster Sputter with Multi Target Chamber

SSLS 120

Multi Purpose 1:1 Direct Sputtering System with Multi Target

SSLS 130

Vertical Inline Sputtering System

SVIS G8

SHTR W900

Evaporation System for Thing film deposition, etc.

SE 805

E-Beam & High Performance Ion Gun Combination

SE 805G

PECVD System for SiOx/SiNx/a-Si

SPC 601

PECVD System for SiOx/SiNx/a-Si/DLC

SPC 603

Anti-stiction Layer Coating System

SVS Series

Microwave Asher

SMA 601

Coating Service

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