Sorona - Komachine

Sorona

Semi conductor equipment manufacturer, Precision machine, Semi conductor facility

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Overview Products Documents

Etcher

ICP-RIE PSS Etcher for HBLED

Etcher

SIE 2031

ICP Etcher

Etcher

SIE 601

RIE Etcher

Etcher

SRE 601

Sputter

Cluster Sputter with Multi Target Chamber

Sputter

SCS 110

Cluster Sputter with Multi Target Chamber

Sputter

SSLS 120

Multi Purpose 1:1 Direct Sputtering System with Multi Target

Sputter

SSLS 130

Vertical Inline Sputtering System

Sputter

SVIS G8

Sputter

SHTR W900

Evaporator

Evaporation System for Thing film deposition, etc.

Evaporator

SE 805

E-Beam & High Performance Ion Gun Combination

Evaporator

SE 805G

CVD

PECVD System for SiOx/SiNx/a-Si

CVD

SPC 601

Anti-stiction Layer Coating System

CVD

SVS Series

PECVD System for SiOx/SiNx/a-Si/DLC

CVD

SPC 603

Asher

Microwave Asher

Asher

SMA 601

Coating Service

Coating Service

Coating Service