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  • Sorona

    About Supplier

    Sorona's Products : Display & Semiconductor Equipment, MFG

    - PSS Etcher

    - Sputtering System

    - Evaporation System

    - Dry Etching (RIE, HDP) & Ashing

    - CVD System

    +82-31-667-9954
    +82-31-667-9957
    2726, Seodong-daero, Godeok-myeon, Pyeongtaek-si, Gyeonggi-do, Korea

    Product List

    Etcher

    ICP-RIE PSS Etcher for HBLED
    SIE 2031
    ICP Etcher
    SIE 601
    RIE Etcher
    SRE 601

    Sputter

    Cluster Sputter with Multi Target Chamber
    SCS 110
    Cluster Sputter with Multi Target Chamber
    SSLS 120
    Multi Purpose 1:1 Direct Sputtering System with Multi Target
    SSLS 130
    Vertical Inline Sputtering System
    SVIS G8
    SHTR W900

    Evaporator

    Evaporation System for Thing film deposition, etc.
    SE 805
    E-Beam & High Performance Ion Gun Combination
    SE 805G

    CVD

    PECVD System for SiOx/SiNx/a-Si
    SPC 601
    Anti-stiction Layer Coating System
    SVS Series
    PECVD System for SiOx/SiNx/a-Si/DLC
    SPC 603

    Asher

    Microwave Asher
    SMA 601

    Coating Service

    Coating Service