This product is manufactured by
PRESYS
Manufacturer information
PRESYS
Semi conductor equipment manufacturer, Software, Valve, New renewable energy and more
Inquiry
How to order
Problem with product info?
Update request
Manufacturer
PRESYS
Product Type
Machine
Brand
-
SKU
60335
Product Name
Butterfly Gate Valve
Model Name
V83 Series
Size
-
Weight
-
Product Details
Application
- Sputter Deposition
- Plasma Etch
- CVD
- Other application that require pressure controller
Features
- Pneumatic actuator
- Bypass pumping line
- Low Vibration Easy maintenance
Options
- Various o-ring compounds (Kalrez®, Chemraz®, etc.)
Pressure range | 1 x 10-7 mbar to 1.5 bar | |
Leak rate : body, seat | < 1 x 10-7 mbar.ℓ/s | |
Differential pressure on the gate | ≤ 1.5 bar in either direction | |
Material | Valve body | AL6061 |
Gate | AL6061 | |
Valve actuator | AL6061, SS304 | |
Seal Materials | FKM(VITON) | |
Temperature | Valve body | 120℃ |
Valve actuator | 60℃ | |
Operation | Double acting | |
Cycle until first service | 500,000 | |
Position sensor | SMC (D-A93) | |
More products
Solar, LCD, FPDV75 Series
Dual Body TypeV70 Series
Twin Body TypeV70 Series
With Separation CoverV70 Series
Dual Seal TypeV77 Series
Auto Gate ValveV22 Series
Bellows Seal TypeV21 Series
Soft Start Angel Valve (Unable to control Flow Rate)V46 Series
Soft Start Angel Valve (Able to control Flow Rate)V44 Series
Rectangular Gate ValveV60 Series
Pendulum Gate Valve (Large Type)V53 Series
Heated Angle Valve With Temp ControllerV42 Series
Remote Plasma Control ValveV41 Series
Standard TypeV74 Series
Standard TypeV77 Series
1/4
