PRESYS
PRESYS
Description
Application
- Sputter Deposition
- Plasma Etch
- CVD
- Other application that require pressure controller
Features
- Pneumatic actuator
- Bypass pumping line
- Low Vibration Easy maintenance
Options
- Various o-ring compounds (Kalrez®, Chemraz®, etc.)
Pressure range | 1 x 10-7 mbar to 1.5 bar | |
Leak rate : body, seat | < 1 x 10-7 mbar.ℓ/s | |
Differential pressure on the gate | ≤ 1.5 bar in either direction | |
Material | Valve body | AL6061 |
Gate | AL6061 | |
Valve actuator | AL6061, SS304 | |
Seal Materials | FKM(VITON) | |
Temperature | Valve body | 120℃ |
Valve actuator | 60℃ | |
Operation | Double acting | |
Cycle until first service | 500,000 | |
Position sensor | SMC (D-A93) | |
Komachine Inc.
Head Office:
Ace Dongbaek Tower 1-1101, 16-4,
Dongbaekjungang-ro 16beon-gil, Giheung-gu,
Yongin City, Gyeonggido, South Korea 17015
Branch Office:
606, Seoul Stratup Center, 10,
Noryangjin-ro, Dongjak-gu, Seoul, South Korea 06938
CEOCharlie Park
Corporate #535-86-00664
ⓒ2024 Komachine Inc. All rights reserved.