Application 
- Sputter Deposition
- Plasma Etch
- CVD
- Other application that require pressure controller 
 
Features 
- Patented L-motion link and dual shifts without springs in the actuator enable faster, smoother actuation with signifi- cantly reduced vibration
- Mechanical locking so at the end of gate travel the valve locks into position
- Welded bellows actuator seal
- Double pneumatic actuator
- Bonnet flange bolts are designed with retainers to eliminate bolts from falling out upon disassembly 
 
Options 
- Custom sizes available
- Various o-ring compounds (Kalrez®, Chemraz®, etc.)