Machine manufacturing for semiconductor manufacturing and machine manufacturing for display manufacturing
| Division | PF-1A | PF-2A | PF-3A | PF-5A | PF-7.5A | PF-10A | PF-15A | PF-20A | PF-25A | PF-30A | 
| Classification of title(HP) | 1 | 2 | 3 | 5 | 7.5 | 10 | 15 | 20 | 25 | 30 | 
| Background view (entry, exit) | 15A | 25A | 32A | 40A | 50A | |||||
| Compressor output(kW) | 0.75 | 1.5 | 2.25 | 3.75 | 5.6 | 7.5 | 11.2 | 15 | 22.5 | 30 | 
| Cooling capacity(at20℃, Kcal/h) | 2,800 | 5,000 | 7,500 | 12,500 | 18,750 | 25,000 | 37,500 | 50,000 | 62,500 | 75,000 | 
| Pump output (Kw) | 0.37~1.1 | 1.1~2.2 | 2.2~4 | |||||||
| Pump maximum volume(M) | 10~35 | 10~35 | 10~50 | |||||||
| Pump max flow(L/min) | 20~100 | 100~200 | 200~400 | |||||||
| How to display settings | Digital controller | |||||||||
| Safety | Low level alarm, high pressure/low pressure alarm, current overload cut-off, reverse phase prevention High temperature/low temperature alarm abnormality, water flow detection abnormality, freeze protection function, wireless remote control | |||||||||
| Tank Capacity(L) | 25 | 50 | 70 | 160 | 160 | 220 | 270 | 380 | 380 | 490 | 
| Size LxWxH(mm) | 600x 520x 870 | 700x 600x 1,000 | 900x 700x 1,100 | 1,340x 650x 1,400 | 1,540x 750x 1,450 | 1,540x 800x 1,450 | 1,770x 900x 1,720 | 2,070x 1,000x 1,775 | 2,630x 900x 1,775 | 2,930x 1,000x 1,815 | 
| Total Power Consumption (Kw/h) | 2.5 | 3.3 | 4.9 | 4.5 | 7.1 | 9.4 | 15 | 18.7 | 28 | 35.5 | 
| Power Specifications(V) | AC1Φ 220V 50/60Hz | AC1Φ 220V 50/60Hz AC3Φ 220/380/480V 50/60Hz | AC3Φ 220/380/440V 50/60Hz | |||||||
※ The appearance and specifications of all products are subject to change without notice. (Option: ±0.1℃ temperature control order production)