Machine manufacturing for semiconductor manufacturing and machine manufacturing for display manufacturing
① Control and Electricity / Communication Module
② Real-time monitoring of secondary refrigerant storage and automatic supply and demand of heater modules
③ Heater Module (HTM-7K) In-out slide only heater modules can be replaced
④ Chiller Module (REFM-22K) In-Out Chiller Module Only Replaceable
※ The appearance and specifications of all products are subject to change without notice. (Additional Optional Ordering)