Chat with us, powered by LiveChat Gen. 6 Planar Air Bearing Stage | Justek - Komachine
Product Name Gen. 6 Planar Air Bearing Stage
Model
Series Motion Stages
Catalog
Product Description

Specification

Axis

X₁, X₂

Y

Work area

2,100mm

400mm

Guide

Air bearing

load mass

250kg

Speed

800m/sec

Acceleration

2m/sec²

Position accuracy(보정후)

4㎛

Repeatability

±1㎛

Option

Theta axis

Applications

LCD pattern inspection equipment etc

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