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XY Co-planar Air Bearing Stage
Model Name
-
Series
Motion Stages
Data
-
Manufacturer information
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Justek

Linear motor, Stage, Servo driver, Rotary DD motor, Multi controller, High precision motion stag and more

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Manufacturer
Justek
Product Type
Machine
Brand
-
SKU
55472
Product Name
XY Co-planar Air Bearing Stage
Model Name
-
Size
-
Weight
-
Product Details

Description

Since the load is supported by the XY plane, XY Co-Planar stage is free from the deformation caused by the movement of the load, common in the structure where Y axis is loaded on the X axis. This gives the advantages of high structural stability and low height. It can also generate various motions by use of the additional Z and T axis.

 

Specification

Axis

   
Work area

520mm X 520mm X 6mm(Z) X 360deg(T)

Guide

Air bearing

Load mass

20kg

Acceleration

2m/sec²

Position accuracy(보정후)

1㎛

Repeatability

±0.5㎛

Speed ​​ripple

0.1%, at 100mm/sec

T axis, Z axis

DD Motor, wedge type

Applications

Solar cell, Wafer Equipment, etc.

More products
Justek
Linear motor, Stage, Servo driver, Rotary DD motor, Multi controller, High precision motion stag and more
Ever since starting business from manufacturing linear motors in 1999, Justek has contributed to the growth of Electronic Component industry by developing key components and devices for precision motion control essential to produce production equipment for semiconductors and FPD(Flat Panel Display) including rotary direct drive motors, servo drivers, multi-axis controller, and high precision motion stages. In accordance with the customers’ demands for high speed and high precision, Justek pursues completeness in direct-drive technology in linear and rotary motions. Based on expertise and experiences acquired during the last decade, Justek focuses on developing the state-of-the-art technologies for direct drive motion control to keep the technological leadership in the global market. Justek also pursues better customer satisfaction through the close partnership. Justek strongly supports collaborative engineering with customers in developing new products and application systems.
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