Chat with us, powered by LiveChat Gen. 4 XYZ Ceramic Air Bearing Stage | Justek - Komachine
Product Name Gen. 4 XYZ Ceramic Air Bearing Stage
Model
Series Motion Stages
Catalog
Product Description

Description

Ceramic is superior to granite in terms of straightness, stiffness and water absorption (zero), so that ceramic is more robust against deformation and deterioration. Ceramic air bearing stages are suitable for the equipment requiring high class accuracy.

 

Specification

Axis

X₁, X₂

Y

Work area

800mm

920mm

Guide

Granite air bearing

Ceramic air bearing

Load mass

30kg/Z axis

Speed

500mm/sec

Acceleration

5m/sec²

Position accuracy(보정후)

±0.3㎛

Repeatability

±0.1㎛

정지안정성

±0.05㎛

Applications

Precision Length Measurement Equipment

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