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MCA ESC is a key consumable part of the AMAT PVD equipment used in the deposition process in the semiconductor manufacturing process that should be replaced regularly due to high temperature, high pressure conditions and quality problems due to impurities in the chamber of the PVD equipment.

MCA ESC's major technology is to maintain a minimum temperature deviation in all areas of wafers while directly contacting semiconductor silicon wafers while heating them evenly.Since 2011, IMNANOTECH has been accumulating advanced technology while conducting MCA ESC refurbishing business.

We offer the highest level of refurbished services for all types of 200 mm and 300 mm MCA ESC, Ceramic Heater and Magnet Assembly in the latest repair facilities with more than 10 years of experienced technicians in this field. In addition to refurbished services, we also sell 300mm MCA ESC products that are repaired to a similar level as new products.Currently, we are successfully providing the best-refurbished product sales and repair services to our customers worldwide, including the United States, Japan, China, Taiwan and Singapore. Our customers are requesting the most difficult level of repair service and are very satisfied with our overhaul service. We will continue to do our best to develop technology to satisfy our customers. Please contact us for MCA ESC repair services and our refurbished products to ensure the highest quality with our extensive experience and advanced technology.

Mail See Mail Address
Phone +82-31-336-5676
Fax +82-31-336-5676
Company Catalog Catalog-Imnanotech.pdf
Company Address 1, Tongsam-ro 171beon-gil, Namsa-eup, Cheoin-gu, Yongin-si, Gyeonggi-do, Korea