Information
1 Tongsam-ro 171beon-gil, Namsa-eup, Cheoin-gu, Yongin-si, Gyeonggi-do, South Korea
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Overview
- Summary
- IMNANOTECH is a specialized company in the manufacturing and refurbishment of core consumable parts such as MCA ESC heaters, ALN heaters, and magnet assemblies for semiconductor manufacturing processes. The company provides essential consumable parts and repair services for AMAT PVD equipment. Its technology aims to maintain minimal temperature deviation across all areas of semiconductor silicon wafers.IMNANOTECH is a specialized company in the manufacturing and refurbishment of core consumable parts such as MCA ESC heaters, ALN heaters, and magnet assemblies for semiconductor manufacturing processes. The company provides essential consumable parts and repair services for AMAT PVD equipment. Its technology aims to maintain minimal temperature deviation across all areas of semiconductor silicon wafers.
- Key Products/Technologies
- MCA E-Chuck Heater: Manufacturing and refurbishment services for 200mm and 300mm MCA ESC products. Application of core technology to minimize wafer temperature deviation under high-temperature and high-pressure conditions within PVD equipment chambers. A critical consumable part for AMAT PVD equipment.MCA E-Chuck Heater: Manufacturing and refurbishment services for 200mm and 300mm MCA ESC products. Application of core technology to minimize wafer temperature deviation under high-temperature and high-pressure conditions within PVD equipment chambers. A critical consumable part for AMAT PVD equipment.
- ALN Heater: Manufacturing and regeneration services for CVD ALN ceramic heaters and ALN heater dimple products. Used for PR baking, featuring metal screen printable heating elements, and AlN base material (diameter 315~330mm, 4t thickness).ALN Heater: Manufacturing and regeneration services for CVD ALN ceramic heaters and ALN heater dimple products. Used for PR baking, featuring metal screen printable heating elements, and AlN base material (diameter 315~330mm, 4t thickness).
- Magnet Assembly: Manufacturing and refurbishment services for PVD magnet assembly products. Its role in activating electron motion within plasma to improve deposition uniformity.Magnet Assembly: Manufacturing and refurbishment services for PVD magnet assembly products. Its role in activating electron motion within plasma to improve deposition uniformity.
- Standard Heater: Supply of various industrial standard heater products.Standard Heater: Supply of various industrial standard heater products.
- HDP ESC: Provision of Novellus HDP ESC products and related refurbishment services.HDP ESC: Provision of Novellus HDP ESC products and related refurbishment services.
- Refurbishment Technology: World-class refurbishment technology for MCA heaters, ceramic heaters, and magnet assemblies. Application of multi-stage process technologies including bellows replacement, dimple regeneration, repair of damaged internal parts, welding and metallizing repair, electrical part repair, and puck coating and dimple regeneration.Refurbishment Technology: World-class refurbishment technology for MCA heaters, ceramic heaters, and magnet assemblies. Application of multi-stage process technologies including bellows replacement, dimple regeneration, repair of damaged internal parts, welding and metallizing repair, electrical part repair, and puck coating and dimple regeneration.
- Core Advantages
- World-class Refurbishment Technology: Securing world-class technology and quality in the repair and regeneration of semiconductor PVD and CVD process equipment parts. Possession of core regeneration technologies such as bellows replacement, dimple regeneration, and welding and metallizing repair.World-class Refurbishment Technology: Securing world-class technology and quality in the repair and regeneration of semiconductor PVD and CVD process equipment parts. Possession of core regeneration technologies such as bellows replacement, dimple regeneration, and welding and metallizing repair.
- High Product Reliability and Cost-Effectiveness: Refurbished products offering up to 30% longer lifespan compared to new AMAT products, maintaining a low defect rate of less than 1% for years. Provision of cost-efficient solutions to customers.High Product Reliability and Cost-Effectiveness: Refurbished products offering up to 30% longer lifespan compared to new AMAT products, maintaining a low defect rate of less than 1% for years. Provision of cost-efficient solutions to customers.
- Broad Equipment Compatibility and Parts Inventory: Maintaining an extensive stock of surplus and second-source parts for a wide range of semiconductor equipment, including AMAT, Centura, Endura, HDP Ultima Plus, Novellus, LAM, Mattson, TEL Parts, and IMP Parts. Ability to promptly respond to diverse customer needs.Broad Equipment Compatibility and Parts Inventory: Maintaining an extensive stock of surplus and second-source parts for a wide range of semiconductor equipment, including AMAT, Centura, Endura, HDP Ultima Plus, Novellus, LAM, Mattson, TEL Parts, and IMP Parts. Ability to promptly respond to diverse customer needs.
- Technological Innovation and Patent Acquisition: Continuously striving for technological innovation with patent registrations for 'ESC recycling System' and 'repair method of susceptor'.Technological Innovation and Patent Acquisition: Continuously striving for technological innovation with patent registrations for 'ESC recycling System' and 'repair method of susceptor'.
- Over 10 Years of Experienced Technicians: Providing the highest level of refurbished services based on advanced technology accumulated since 2011 in the MCA ESC refurbishing business, with over 10 years of experienced technicians in this field.Over 10 Years of Experienced Technicians: Providing the highest level of refurbished services based on advanced technology accumulated since 2011 in the MCA ESC refurbishing business, with over 10 years of experienced technicians in this field.
- Customer-Centric Technology Development: Delivering satisfactory overhaul services even for the most challenging repair requests from customers, with continuous efforts in technology development for customer satisfaction.Customer-Centric Technology Development: Delivering satisfactory overhaul services even for the most challenging repair requests from customers, with continuous efforts in technology development for customer satisfaction.
- Target Industries
- Semiconductor Manufacturing Industry: Providing manufacturing and repair services for core consumable parts of PVD (Physical Vapor Deposition) and CVD (Chemical Vapor Deposition) process equipment.Semiconductor Manufacturing Industry: Providing manufacturing and repair services for core consumable parts of PVD (Physical Vapor Deposition) and CVD (Chemical Vapor Deposition) process equipment.
- Major Markets
- South Korea, China, Taiwan, Singapore, JapanSouth Korea, China, Taiwan, Singapore, Japan
- United StatesUnited States
- Certifications/Patents
- Patent registration: 'ESC recycling System'Patent registration: 'ESC recycling System'
- Patent registration: 'Repair method of susceptor'Patent registration: 'Repair method of susceptor'
- Quality Management System Certificate: SO Global Quality CertificationQuality Management System Certificate: SO Global Quality Certification
- Korean patent certificate holderKorean patent certificate holder
Introduction
Location
1 Tongsam-ro 171beon-gil, Namsa-eup, Cheoin-gu, Yongin-si, Gyeonggi-do, South Korea
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