A specialized company in the manufacturing and refurbishment of MCA ESC heaters, ALN heaters, magnet assemblies, and standard heaters for semiconductor manufacturing processes. Providing core consumable parts and repair services for AMAT PVD equipment. Possessing technology to maintain minimal temperature deviation across all areas of semiconductor silicon wafers.AspecializedcompanyinthemanufacturingandrefurbishmentofMCAESCheaters,ALNheaters,magnetassemblies,andstandardheatersforsemiconductormanufacturingprocesses.ProvidingcoreconsumablepartsandrepairservicesforAMATPVDequipment.Possessingtechnologytomaintainminimaltemperaturedeviationacrossallareasofsemiconductorsiliconwafers.
Key Products/TechnologiesKeyProducts/Technologies
MCA E-Chuck Heater: Manufacturing and refurbishment services for 200mm and 300mm MCA ESC products. Applying core technology to minimize wafer temperature deviation under high-temperature and high-pressure conditions within PVD equipment chambers.MCAE-ChuckHeater:Manufacturingandrefurbishmentservicesfor200mmand300mmMCAESCproducts.Applyingcoretechnologytominimizewafertemperaturedeviationunderhigh-temperatureandhigh-pressureconditionswithinPVDequipmentchambers.
ALN Heater: Manufacturing and regeneration services for CVD ALN ceramic heaters and ALN heater dimple products. Capability to restore heater performance and extend lifespan through dimple regeneration technology.ALNHeater:ManufacturingandregenerationservicesforCVDALNceramicheatersandALNheaterdimpleproducts.Capabilitytorestoreheaterperformanceandextendlifespanthroughdimpleregenerationtechnology.
Magnet Assembly: Manufacturing and refurbishment services for PVD magnet assembly products. Role in activating electron motion within plasma to improve deposition uniformity.MagnetAssembly:ManufacturingandrefurbishmentservicesforPVDmagnetassemblyproducts.Roleinactivatingelectronmotionwithinplasmatoimprovedepositionuniformity.
Standard Heater: Supply of various industrial standard heater products.StandardHeater:Supplyofvariousindustrialstandardheaterproducts.
HDP ESC: Provision of Novellus HDP ESC products and related refurbishment services.HDPESC:ProvisionofNovellusHDPESCproductsandrelatedrefurbishmentservices.
Refurbishment Technology: World-class refurbishment technology for MCA heaters, ceramic heaters, and magnet assemblies. Application of multi-stage process technologies including bellows replacement, dimple regeneration, repair of damaged internal parts, welding and metallizing repair, electrical part repair, and puck coating and dimple regeneration.RefurbishmentTechnology:World-classrefurbishmenttechnologyforMCAheaters,ceramicheaters,andmagnetassemblies.Applicationofmulti-stageprocesstechnologiesincludingbellowsreplacement,dimpleregeneration,repairofdamagedinternalparts,weldingandmetallizingrepair,electricalpartrepair,andpuckcoatinganddimpleregeneration.
Future Technology Development: Planning for the development of various ESCs, including ODF ESCs utilizing LED and OLED technologies.FutureTechnologyDevelopment:PlanningforthedevelopmentofvariousESCs,includingODFESCsutilizingLEDandOLEDtechnologies.
Core AdvantagesCoreAdvantages
Unrivaled Refurbishment Technology: Securing world-class technology and quality in the repair and regeneration of semiconductor PVD and CVD process equipment parts. Possessing core regeneration technologies such as bellows replacement, dimple regeneration, and welding and metallizing repair.UnrivaledRefurbishmentTechnology:Securingworld-classtechnologyandqualityintherepairandregenerationofsemiconductorPVDandCVDprocessequipmentparts.Possessingcoreregenerationtechnologiessuchasbellowsreplacement,dimpleregeneration,andweldingandmetallizingrepair.
Skilled Professionals and State-of-the-Art Facilities: Providing the highest level of refurbishment services based on experienced technicians with over 10 years of expertise and modern repair facilities. Equipped with advanced production facilities including ESC inspectors, leak inspectors, ultrasonic cleaners, and laser welding machines.SkilledProfessionalsandState-of-the-ArtFacilities:Providingthehighestlevelofrefurbishmentservicesbasedonexperiencedtechnicianswithover10yearsofexpertiseandmodernrepairfacilities.EquippedwithadvancedproductionfacilitiesincludingESCinspectors,leakinspectors,ultrasoniccleaners,andlaserweldingmachines.
High Product Reliability and Cost-Effectiveness: Refurbished products offering up to 30% longer lifespan compared to new AMAT products, maintaining a low defect rate of less than 1% for years. Providing cost-efficient solutions to customers.HighProductReliabilityandCost-Effectiveness:Refurbishedproductsofferingupto30%longerlifespancomparedtonewAMATproducts,maintainingalowdefectrateoflessthan1%foryears.Providingcost-efficientsolutionstocustomers.
Broad Equipment Compatibility and Parts Inventory: Maintaining an extensive stock of surplus and second-source parts for a wide range of semiconductor equipment, including AMAT, Centura, Endura, HDP Ultima Plus, Novellus, LAM, Mattson, TEL Parts, and IMP Parts. Ability to promptly respond to diverse customer needs.BroadEquipmentCompatibilityandPartsInventory:Maintaininganextensivestockofsurplusandsecond-sourcepartsforawiderangeofsemiconductorequipment,includingAMAT,Centura,Endura,HDPUltimaPlus,Novellus,LAM,Mattson,TELParts,andIMPParts.Abilitytopromptlyrespondtodiversecustomerneeds.
Technological Innovation and Patent Acquisition: Continuously striving for technological innovation with patent registrations for 'ESC recycling System' and 'repair method of susceptor'. Establishing stable business processes through quality management system certifications.TechnologicalInnovationandPatentAcquisition:Continuouslystrivingfortechnologicalinnovationwithpatentregistrationsfor'ESCrecyclingSystem'and'repairmethodofsusceptor'.Establishingstablebusinessprocessesthroughqualitymanagementsystemcertifications.
Target IndustrieTargetIndustrie
Semiconductor Manufacturing Industry: Providing manufacturing and repair services for core consumable parts of PVD (Physical Vapor Deposition) and CVD (Chemical Vapor Deposition) process equipment [database, cite: 2, 8, 9, 11, 14].SemiconductorManufacturingIndustry:ProvidingmanufacturingandrepairservicesforcoreconsumablepartsofPVD(PhysicalVaporDeposition)andCVD(ChemicalVaporDeposition)processequipment[database,cite:2,8,9,11,14].
Display Industry: Potential for business expansion into the display sector through the planned development of ODF ESCs utilizing LED and OLED technologies.DisplayIndustry:PotentialforbusinessexpansionintothedisplaysectorthroughtheplanneddevelopmentofODFESCsutilizingLEDandOLEDtechnologies.
Major MarketsMajorMarkets
South Korea, China, Taiwan, Singapore, JapanSouthKorea,China,Taiwan,Singapore,Japan
United StatesUnitedStates
Certifications/PatentsCertifications/Patents
Korean patent certificate holder.Koreanpatentcertificateholder.
Quality Management System Certificate (SO Global Quality Certification).QualityManagementSystemCertificate(SOGlobalQualityCertification).
Patent registration: 'Repair method of susceptor'.Patentregistration:'Repairmethodofsusceptor'.