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EFEM
Model Name
-
Series
Semiconductor Equipment
Data
-
Manufacturer information
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BLUE CORD

Semi conductor equipment manufacturer, Central monitoring system, Semi conductor process equipment, Multimedia equipment and more

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Manufacturer
BLUE CORD
Product Type
Machine
Brand
-
SKU
130597
Product Name
EFEM
Model Name
-
Size
-
Weight
-
Product Details

300mm EFEM은 Track장비, Wet Etcher등 반도체 전공정 장비의 Wafer Loading & Unloading을 수행하는 장비입니다.

 

Specification

- 2~4 Load Port in Frong(Customized Product)

- Semi Standard Compliance

- Linear Track for Wafer Transfer Robot Traveling

- Easy Operating & Maintenance

- PIO Sensor & RFID Read/Write

- Enclose Structure

- Fastest cycle time(Hight throughput)

- Wafer Cooling

- Communications : SECS Ⅰ / SECS Ⅱ / GEM

BLUE CORD
BLUE CORD
Semi conductor equipment manufacturer, Central monitoring system, Semi conductor process equipment, Multimedia equipment and more
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