Overview
- Summary
- ALPSITEC is a designer and manufacturer of CMP (Chemical Mechanical Planarization) equipment, providing solutions for semiconductor wafer polishing and planarizationALPSITEC is a designer and manufacturer of CMP (Chemical Mechanical Planarization) equipment, providing solutions for semiconductor wafer polishing and planarization
- Key Products/Technologies
- Pcox 200s: A standalone module for process development, offering 4-inch to 200mm wafer compatibility, automatic loading/unloading, 10 polishing steps, ex-situ and in-situ conditioning, an integrated slurry pump, and quick exchange capabilities for platens, carriers, and conditioning toolsPcox 200s: A standalone module for process development, offering 4-inch to 200mm wafer compatibility, automatic loading/unloading, 10 polishing steps, ex-situ and in-situ conditioning, an integrated slurry pump, and quick exchange capabilities for platens, carriers, and conditioning tools
- Pcox 202-203-204: A series of modular, production-oriented machines with configurations including 2 to 4 polishing modules, sharing similar characteristics with the Pcox 200s for high throughput and availabilityPcox 202-203-204: A series of modular, production-oriented machines with configurations including 2 to 4 polishing modules, sharing similar characteristics with the Pcox 200s for high throughput and availability
- E460: A semi-automatic system for polishing and planarizing 1-inch to 8-inch wafers, optimized for research and development and small-scale production, featuring four slurry pumps and ex-situ or in-situ conditioning systemsE460: A semi-automatic system for polishing and planarizing 1-inch to 8-inch wafers, optimized for research and development and small-scale production, featuring four slurry pumps and ex-situ or in-situ conditioning systems
- E400 E: A compact, tabletop tool designed for polishing and planarizing single wafers with diameters between 1 inch and 4 inches, as well as various shapes like squares and wafer quarters, optimized for R&D and new material developmentE400 E: A compact, tabletop tool designed for polishing and planarizing single wafers with diameters between 1 inch and 4 inches, as well as various shapes like squares and wafer quarters, optimized for R&D and new material development
- E550: A previous model replaced by the Pcox series, now available in a new version running on Windows 7, suitable for production lines with automatic wafer handling and a dual platen designE550: A previous model replaced by the Pcox series, now available in a new version running on Windows 7, suitable for production lines with automatic wafer handling and a dual platen design
- Core technologies include expertise in designing and manufacturing semi-automatic and automated systems for wafer polishing and planarization, capability to process various wafer sizes (1-inch to 8-inch, 200mm) and materials, advanced flexible process recipe settings and real-time parameter control technologies, and integrated slurry delivery and conditioning system technologiesCore technologies include expertise in designing and manufacturing semi-automatic and automated systems for wafer polishing and planarization, capability to process various wafer sizes (1-inch to 8-inch, 200mm) and materials, advanced flexible process recipe settings and real-time parameter control technologies, and integrated slurry delivery and conditioning system technologies
- Core Advantages
- Inheritance of robust mechanical concepts from Steag Electronic Systems, ensuring high availability and durabilityInheritance of robust mechanical concepts from Steag Electronic Systems, ensuring high availability and durability
- Multi-use of identical components, simplifying maintenance and reducing spare parts inventoryMulti-use of identical components, simplifying maintenance and reducing spare parts inventory
- Over 15 years of experience in CMP and tool control, enabling customized designs and solutions tailored to specific customer requirementsOver 15 years of experience in CMP and tool control, enabling customized designs and solutions tailored to specific customer requirements
- Intelligent design of Pcox machines offering a new approach compared to competitors, suitable for emerging companies and spin-offs from large laboratoriesIntelligent design of Pcox machines offering a new approach compared to competitors, suitable for emerging companies and spin-offs from large laboratories
- Direct transferability of processes developed on Pcox 200s (R&D) to Pcox 20x (production) machines, ensuring long tool life and preventing obsolescenceDirect transferability of processes developed on Pcox 200s (R&D) to Pcox 20x (production) machines, ensuring long tool life and preventing obsolescence
- Compactness, simplicity, robustness, and cost-effectiveness of their machinesCompactness, simplicity, robustness, and cost-effectiveness of their machines
- Internet connectivity for distant and immediate support, including troubleshooting and tool use trainingInternet connectivity for distant and immediate support, including troubleshooting and tool use training
- Target Industries
- Chemical Mechanical Planarization (CMP) processes for semiconductor wafersChemical Mechanical Planarization (CMP) processes for semiconductor wafers
- Planarization of nanometric junctions for the fabrication of nanoelectronic devices such as RRAM, SET, and MIMPlanarization of nanometric junctions for the fabrication of nanoelectronic devices such as RRAM, SET, and MIM
- Planarization of metal nanowires and polishing of Si3N4 and SiO2 to reduce surface roughnessPlanarization of metal nanowires and polishing of Si3N4 and SiO2 to reduce surface roughness
- Planarization of gold microstructures, research and development applications, and new material developmentPlanarization of gold microstructures, research and development applications, and new material development
- Meeting various manufacturing requirements from prototyping and small-scale production to mass productionMeeting various manufacturing requirements from prototyping and small-scale production to mass production
- Major Markets
- South Korea (information provided via Komachine)South Korea (information provided via Komachine)
- France (company headquarters)France (company headquarters)
- Canada (Université de Sherbrooke supply case)Canada (Université de Sherbrooke supply case)
- Certifications/Patents
- Certified as a 'Verified & Trusted Manufacturer' with a 'Certified Mark' on KomachineCertified as a 'Verified & Trusted Manufacturer' with a 'Certified Mark' on Komachine
- Possession of technical expertise through over 15 years of experience in CMP and tool controlPossession of technical expertise through over 15 years of experience in CMP and tool control
- High reliability and ease of maintenance due to robust mechanical concepts and multi-use of identical componentsHigh reliability and ease of maintenance due to robust mechanical concepts and multi-use of identical components
- Technical capability as an official and exclusive integrator for COGNEX in industrial vision through its ALPSITEC VISION divisionTechnical capability as an official and exclusive integrator for COGNEX in industrial vision through its ALPSITEC VISION division
Introduction
Key Products
Location
224 Rue des 20 Toises, 38950 Saint-Martin-le-Vinoux, France
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