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Bench Top Sputter Series
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코리아바큠테크진공증착, 식각장비, 세정장비, 진공부품 등 진공 시스템 전문업체
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031-987-6320
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jsg@koreavac.com
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88726
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Bench Top Sputter Series
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<tab title="Overview">

Korea Vacuum Tech, Ltd. (KVT) is proud to introduce the latest revolutionary

addition to our product line, the Intelsi-S, small vacuum system. Deposite its compact

convenient size, easy operation and affordability, functionality is in no way sacrificed. 

The modular design of the Intelsi-S makes it highly configurable to meet specific

customer needs and numerous stock options are also available. A fully automated

Laptop PC helps round out this extremely usable yet robust diminutive package.

Advantages

≻ Easy to operate

≻ No cooling required

≻ Precise reproducible coating

≻ Fully adaptable to a wide range of specimens

≻ Easy loading and unloading of specimens

 

Features

≻ Extreme versatility

≻ High capacity vacuum pumping

≻ Fully automated PC control

≻ Capable of producing very thin resultant films

≻ Suitable for reactive gas deposition (O2, Ne etc.)

≻ Gold coating for SEM

≻ Metal Deposition such as Al, Au and so on


<tab title="Specifications">

Specifications

Intelsi – S

Intelsi - ST

System Dimensions

501mm(W) x 540mm(D) x 421mm(H) – 19.7” x 21.3” x 16.6”

35kg (77.2 lb)

Electrical / Compressed Air

110V/220V, Single Phase, 50/60Hz / 6~7kfg/cm2

Target Size

2 inch (50.8mm) diameter

Pumping Capability

Rotary Pump

Rotary & Turbo Molecular Pump

Gas Supply Unit

Metering Valve

DC Power Supply

Ultimate Pressure

Less than 5.0E-3Torr

Less than 5.0E-6Torr

Auto pumping, Auto process and auto vent using PLC & Simple buttons

Deposition Source

Sputtering Cathode 1EA

Vacuum Gauge(Reading Range)

ATM to 5.0E-3Torr

ATM to 5.0E-6Torr

Throttle Valve

N/A

On/Off type

Film Thickness Uniformity

Less than ±5%

Optional Items

Substrate rotation & Z-motion, Substrate Heating, MFC
RF Power supply, QCM thickness Monitor

이 기업의 다른 제품
코리아바큠테크진공증착, 식각장비, 세정장비, 진공부품 등 진공 시스템 전문업체
KVT has researched many plasma related studies. The main products are vacuum deposition systems (PVD,CVD), etcher, cleaning systems for R & D and device mass production, thermal process and customized vacuum systems.  KVT has produced vacuum systems for faster and more convenient process, and especially fully automated systems has been developed for device mass production. We have enhanced export to US, Japan, and have got good reputation about quality. Also KVT has KA A9001/ISO 9001/EN ISO 9001 related design, development, production, and service.
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