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KVR-6000 Series
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코리아바큠테크진공증착, 식각장비, 세정장비, 진공부품 등 진공 시스템 전문업체
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031-987-6320
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jsg@koreavac.com
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88716
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KVR-6000 Series
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Overview

Rapid Thermal Processing (RTP) refer to a semiconductor manufacturing process which

instantly heats silicon wafer to high temperatures (up to 1100℃ / 2012℉) under

different atmospheric conditions such as oxygen or nitrogen.

The Korea Vacuum Tech, Ltd. RTP System offers the highest Rapid Thermal Annealing

(RTA) performance for a wide range of application with a low cost of ownership.

Designed to meet the most stringent requirements of today’s semiconductor

technologies and beyond, the RTP Module provides complete temperature control

necessary for advanced semiconductor manufacturing applications.

The Korea Vacuum Tech, Ltd. RTP system utilizes and array of unique technical feature

which provide optimal uniformity, repeatability and precision previously unachievable in

semiconductor manufacturing.

Features

≻ High-power Quartz Lamps

        Wafers are heated by an array of high-power quartz lamps.

≻ Rapid Heating

        The maximum heating rate of the wafer is 100℃/ sec (212℉/sec).

≻ Digital display shows both the actual wafer temperature as well as the desired pre-set temperature 

        PID constants can be easily set by the standard equipment auto-tuning function.

≻ Variable Pressure Range

        Pressure ranges from high vacuum to ambient atmospheres with oxygen or nitrogen can be utilized.

≻ Compatible with various gases (Ar, H2, O2, N2)

 

Applications

≻ Silicide to Si process

≻ Annealing after ion implantation: sheet resistance

≻ LED process such as GaN


Substrate size

6” wafer

Substrate holder

6.5” SiC

Heating elements

Quartz Lamp

Chamber Material

Water or air cooled Al or SUS304 chamber with quartz window

Pumping system:

Rotary pump

Gas control:

Mass Flow Meter or MFC


Korea Vacuum Tech  KVR-6000 Series

코리아바큠테크진공증착, 식각장비, 세정장비, 진공부품 등 진공 시스템 전문업체
KVT has researched many plasma related studies. The main products are vacuum deposition systems (PVD,CVD), etcher, cleaning systems for R & D and device mass production, thermal process and customized vacuum systems.  KVT has produced vacuum systems for faster and more convenient process, and especially fully automated systems has been developed for device mass production. We have enhanced export to US, Japan, and have got good reputation about quality. Also KVT has KA A9001/ISO 9001/EN ISO 9001 related design, development, production, and service.
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