The Bluecord Edge Grip Aligner is a high reliable product having high-precision mechanics.

By excluding vacuum-operated chuck, the model EGA300C is free of backside contamination of wafer.

 

Specification

- Modular wafer edge grip aligner with No external dedicated controller Footprint advantage, improved wafer flow

 

- free for the backside contamination

- Provide dual mode operation such as "Hi accuracy / Hi speed" mode

 

- Class 1 cleanroom compatible

- Highly reliable and repeatable positioning

- Fastest cycle time (High throughput)

- Easy to use and install