Multistage Heater Furnace TNBF-9090 by THERMONIK - Komachine Supplier Profile and Product List

THERMONIK

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THERMONIK

Multistage Heater Furnace

Model

Series

Graphite Furnace

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Origin

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Description

Multistage Heater Furnace

Heat zone	1000 x 1000 x 650H, 6 stages ※Size and the number of stages can be changed according to consumer needs
Max temp	1500℃ ∼ 2900℃
Degree of vacuum	Around 10(-2) torr ※When attaching a diffusion pump, around 10(-5) torr
Used Gas	H2, N2, Ar, HCl, Cl2
Utility	Power 180KVA, Cooling water, Process Gas, Air
Optional items	Zone control method is manufactured according to consumer needs Forced cooling system Automatic door open method by air cylinder method CE, SEMI standard certification
Characteristic	1) Putting samples on the heater and firing them from the top and bottom would make the temperature distribution excellent. 2) The effective heating zone is wider than the capacity of the furnace, so the heat efficiency, power consumption, and process gas consumption are small.

Inquiry

Komachine Inc.

Head Office:

Ace Dongbaek Tower 1-1101, 16-4,

Dongbaekjungang-ro 16beon-gil, Giheung-gu,

Yongin City, Gyeonggido, South Korea 17015

Branch Office:

606, Seoul Stratup Center, 10,

Noryangjin-ro, Dongjak-gu, Seoul, South Korea 06938

CEOCharlie Park

Corporate #535-86-00664