
FPD Transfer Robot for 8G
Robo-VAC-FD8G
FPD Transfer Robot for 5.5G
Robo-VAC-FD5.5G
Wafer Transfer Robot
Robo-VAC-WS Series
FPD Transfer Robot
Robo-VAC-FS Series
Wafer Transfer Robot
Robo-VAC-WD Series
Multi Transfer Robot for 5G
Robo-VAC-FM5G
FPD Transfer Robot for 8G
Robo-AIR-FD8G
FPD Transfer Robot for 2G~4.5G
Robo-AIR-F Series
2"~18" Wafer Transfer Robot
Robo-AIR-WD Series
8", 12" Scara Robot
Robo-AIR-SW Series
Non-Contact Hand
-
Transfer System
-
500mm Working Radius 6-Axis Articulated Robot Arm
UR3
6-axis Robot with 850mm Working Radius
UR5
6-Axis Robot with 1300mm Working Radius
UR10