Information
Budapest, Prielle Kornélia u. 2, 1117 Hungary
+36 1 505 4695
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Overview
- Summary
- SEMILAB is a global company providing state-of-the-art metrology solutions for the semiconductor, solar, and display industries, supplying a wide range of measurement equipment for both in-line and R&D segments. The company acts as a strategic metrology supplier for leading wafer manufacturers, IC device makers in the More-than-Moore market segment, and the solar and display industries worldwide. It covers the entire R&D lifecycle of product innovation, from innovative research, measurement development, product design and manufacturing to implementation, integration, and maintenance. With over 45 product lines and more than 300 unique products, the company offers diverse metrology solutions based on optical and electrical measurement technologies, thin film applications, and automation developments tailored to customer requirements.SEMILAB is a global company providing state-of-the-art metrology solutions for the semiconductor, solar, and display industries, supplying a wide range of measurement equipment for both in-line and R&D segments. The company acts as a strategic metrology supplier for leading wafer manufacturers, IC device makers in the More-than-Moore market segment, and the solar and display industries worldwide. It covers the entire R&D lifecycle of product innovation, from innovative research, measurement development, product design and manufacturing to implementation, integration, and maintenance. With over 45 product lines and more than 300 unique products, the company offers diverse metrology solutions based on optical and electrical measurement technologies, thin film applications, and automation developments tailored to customer requirements.
- Key Products/Technologies
- Wafer Geometry Monitoring Systems (WG-2201, WG-2202, WG-2500): Solutions supporting precise dimensional analysis in semiconductor substrate manufacturing, utilizing non-contact capacitive sensing technology. These systems provide measurements for thickness, bow/warp, total thickness variation (TTV), and flatness, with optional non-contact resistivity measurement and film stress characterization.Wafer Geometry Monitoring Systems (WG-2201, WG-2202, WG-2500): Solutions supporting precise dimensional analysis in semiconductor substrate manufacturing, utilizing non-contact capacitive sensing technology. These systems provide measurements for thickness, bow/warp, total thickness variation (TTV), and flatness, with optional non-contact resistivity measurement and film stress characterization.
- Spectroscopic Ellipsometer: A key technology for fast and accurate measurement of thin film thickness and optical properties, essential for process control parameter determination in the display industry. It is particularly suitable for measuring TOPCon structures at various process stages, including ~100nm poly-Si and after 1.5nm oxide separation.Spectroscopic Ellipsometer: A key technology for fast and accurate measurement of thin film thickness and optical properties, essential for process control parameter determination in the display industry. It is particularly suitable for measuring TOPCon structures at various process stages, including ~100nm poly-Si and after 1.5nm oxide separation.
- Mask and Wafer Inspection Solutions: Technologies enabling the detection of defects and irregularities at various stages of semiconductor manufacturing, ensuring the highest level of quality and yield. These systems utilize cutting-edge techniques such as optical and laser scanning for precise and accurate analysis.Mask and Wafer Inspection Solutions: Technologies enabling the detection of defects and irregularities at various stages of semiconductor manufacturing, ensuring the highest level of quality and yield. These systems utilize cutting-edge techniques such as optical and laser scanning for precise and accurate analysis.
- Non-contact Electrical Metrology: A leading field in non-destructive electrical measurement, crucial for understanding semiconductors without damaging devices. It replaces costly and time-consuming IC MOS short-loops, providing rapid feedback through Capacitance-Voltage (C-V) and Current-Voltage (I-V) methods for dielectric capacitance, charges, leakage, and breakdown measurements.Non-contact Electrical Metrology: A leading field in non-destructive electrical measurement, crucial for understanding semiconductors without damaging devices. It replaces costly and time-consuming IC MOS short-loops, providing rapid feedback through Capacitance-Voltage (C-V) and Current-Voltage (I-V) methods for dielectric capacitance, charges, leakage, and breakdown measurements.
- Scanning Probe Microscopy (AFM): A non-contact, non-destructive metrology solution used for surface roughness measurement and defect/contamination inspection of silicon carbide wafers. It provides highly accurate topographical, electrical, and mechanical information for nanoscale wafer surface quality control.Scanning Probe Microscopy (AFM): A non-contact, non-destructive metrology solution used for surface roughness measurement and defect/contamination inspection of silicon carbide wafers. It provides highly accurate topographical, electrical, and mechanical information for nanoscale wafer surface quality control.
- Flat Panel Tester: A dedicated product line for flat panel display production monitoring, offering advanced measurement capabilities for optical and electrical properties of layers on large area substrates during manufacturing. This includes Line Mura and µ-PCR technologies for identifying defects and non-uniformities caused by Excimer Laser Annealing (ELA) in LTPS (Low-Temperature Polysilicon) layers.Flat Panel Tester: A dedicated product line for flat panel display production monitoring, offering advanced measurement capabilities for optical and electrical properties of layers on large area substrates during manufacturing. This includes Line Mura and µ-PCR technologies for identifying defects and non-uniformities caused by Excimer Laser Annealing (ELA) in LTPS (Low-Temperature Polysilicon) layers.
- In-line Process Control Measurement Units for Photovoltaic Industry: Diverse solutions for controlling crystalline silicon solar cell manufacturing processes, including handheld probes for feedstock testing, wafer sorters, in-line photoluminescence imaging, sheet resistance measurement, and anti-reflective coating quality control modules.In-line Process Control Measurement Units for Photovoltaic Industry: Diverse solutions for controlling crystalline silicon solar cell manufacturing processes, including handheld probes for feedstock testing, wafer sorters, in-line photoluminescence imaging, sheet resistance measurement, and anti-reflective coating quality control modules.
- Core Advantages
- Extensive Technology Portfolio: Offering a wide range of metrology solutions based on optical and electrical measurement technologies, thin film applications, and automation developments, with over 45 product lines and more than 300 unique products. The portfolio ranges from simple handheld devices to fully automated production control systems.Extensive Technology Portfolio: Offering a wide range of metrology solutions based on optical and electrical measurement technologies, thin film applications, and automation developments, with over 45 product lines and more than 300 unique products. The portfolio ranges from simple handheld devices to fully automated production control systems.
- Strong R&D Capabilities and Academic Background: Founded in 1989 as a spin-off from the Research Institute for Technical Physics of the Hungarian Academy of Sciences, with over 35 years of experience and a global team of over 1,300 employees, including 200+ physicists, 450+ engineers, and 70+ software developers. Continuous technology integration and expansion through licensing ion implant monitoring methods from IBM and Applied Materials, and acquiring solar cell inspection methods from Basler.Strong R&D Capabilities and Academic Background: Founded in 1989 as a spin-off from the Research Institute for Technical Physics of the Hungarian Academy of Sciences, with over 35 years of experience and a global team of over 1,300 employees, including 200+ physicists, 450+ engineers, and 70+ software developers. Continuous technology integration and expansion through licensing ion implant monitoring methods from IBM and Applied Materials, and acquiring solar cell inspection methods from Basler.
- Non-contact and Non-destructive Measurement Technologies: Most measurement techniques are non-contact and non-destructive, providing precise data for material and process characterization in semiconductors, flat panel displays, and solar cells without product damage. This contributes to reduced production costs and increased productivity.Non-contact and Non-destructive Measurement Technologies: Most measurement techniques are non-contact and non-destructive, providing precise data for material and process characterization in semiconductors, flat panel displays, and solar cells without product damage. This contributes to reduced production costs and increased productivity.
- Global Market Presence and Service Network: Headquartered in Budapest, Hungary, with R&D and product centers in the USA, Germany, and China. Direct sales and service offices in major markets including the USA, Japan, Korea, China, Taiwan, and Singapore, ensuring global customer support.Global Market Presence and Service Network: Headquartered in Budapest, Hungary, with R&D and product centers in the USA, Germany, and China. Direct sales and service offices in major markets including the USA, Japan, Korea, China, Taiwan, and Singapore, ensuring global customer support.
- Industry-Specific Tailored Solutions: Flexibility in providing customized in-line process control and R&D metrology solutions to meet the specific needs of the semiconductor, solar, and display industries. Holding a market-leading position in front-end electrical characterization for silicon-based solar cell manufacturing.Industry-Specific Tailored Solutions: Flexibility in providing customized in-line process control and R&D metrology solutions to meet the specific needs of the semiconductor, solar, and display industries. Holding a market-leading position in front-end electrical characterization for silicon-based solar cell manufacturing.
- Continuous Technological Innovation and Acquisitions: Expanding its portfolio with electrical and optical measurement technologies since its first products, DLTS and carrier lifetime mapper. Integrating key metrology solutions like AFM, nanoindentation, resistivity mapping, 3D structure characterization, surface acoustic wave measurements, and SPV measurements through acquisitions of companies such as Danish DME, Fischer-Cripps Laboratories, SemiMap, Advanced Metrology Systems (AMS), and Semiconductor Diagnostics Inc. (SDI).Continuous Technological Innovation and Acquisitions: Expanding its portfolio with electrical and optical measurement technologies since its first products, DLTS and carrier lifetime mapper. Integrating key metrology solutions like AFM, nanoindentation, resistivity mapping, 3D structure characterization, surface acoustic wave measurements, and SPV measurements through acquisitions of companies such as Danish DME, Fischer-Cripps Laboratories, SemiMap, Advanced Metrology Systems (AMS), and Semiconductor Diagnostics Inc. (SDI).
- Target Industries
- Semiconductor Industry: In-line and R&D metrology solutions for wafer manufacturers, IC device manufacturers, and semiconductor device manufacturers in the More-than-Moore market segment.Semiconductor Industry: In-line and R&D metrology solutions for wafer manufacturers, IC device manufacturers, and semiconductor device manufacturers in the More-than-Moore market segment.
- Photovoltaic Industry: Supplying metrology equipment for front-end electrical characterization and in-line process control in crystalline silicon solar cell manufacturing.Photovoltaic Industry: Supplying metrology equipment for front-end electrical characterization and in-line process control in crystalline silicon solar cell manufacturing.
- Display Industry: Optical and electrical property measurement solutions for flat panel display production monitoring, R&D, and offline quality control.Display Industry: Optical and electrical property measurement solutions for flat panel display production monitoring, R&D, and offline quality control.
- Materials Science and Life Sciences: Providing high-precision characterization tools for R&D, supporting innovation from nanotechnology to biomedical applications.Materials Science and Life Sciences: Providing high-precision characterization tools for R&D, supporting innovation from nanotechnology to biomedical applications.
- Research and Development (R&D): Offering customized R&D solutions and laboratory tools for the semiconductor, photovoltaic, and flat panel display industries, thin film research, and materials science.Research and Development (R&D): Offering customized R&D solutions and laboratory tools for the semiconductor, photovoltaic, and flat panel display industries, thin film research, and materials science.
- Major Markets
- South Korea, Japan, China, Taiwan, SingaporeSouth Korea, Japan, China, Taiwan, Singapore
- Hungary (Headquarters), GermanyHungary (Headquarters), Germany
- USAUSA
- Certifications/Patents
- ISO 9001:2015 Certification: Quality Management System certification for the development, manufacture, and sale of metrology equipment for materials and process characterization used in the semiconductor and photovoltaic industries, including software development and testing.ISO 9001:2015 Certification: Quality Management System certification for the development, manufacture, and sale of metrology equipment for materials and process characterization used in the semiconductor and photovoltaic industries, including software development and testing.
- Over 400 Patents: Holding more than 400 owned patents in the field of material science, with over 310 scientific journal publications demonstrating its technological prowess.Over 400 Patents: Holding more than 400 owned patents in the field of material science, with over 310 scientific journal publications demonstrating its technological prowess.
Introduction
Location
Budapest, Prielle Kornélia u. 2, 1117 Hungary
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