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product Image
Cluster Sputter
Model Name
-
Series
Sputtering System
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Data
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Manufacturer information
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Selcos

Semi conductor, Electronic parts, Solar cell, Organic EL, Display

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Manufacturer
Selcos
Product Type
Machine
Brand
-
SKU
40986
Product Name
Cluster Sputter
Model Name
-
Size
-
Weight
-
Product Details

▷ Suitable for the automated production line and Research & Development system.
▷ It provides a highly integrated Technology and Mechanism

Application

- Applied to various thin film (Metal, Oxide, TCO) process
- Highly integrated semiconductor and
- electronic components substrate processing
- Thin-film solar cell manufacturing process

 

Specification

Configuration Loading, Transfer, Pre-treatment, Deposition(PVD, CVD)
Transfer Hi-vacuum automatic robot
Cathode Planar or Round Magnetron cathode
Target Metal, Oxide, TCO

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Selcos
Selcos
Semi conductor, Electronic parts, Solar cell, Organic EL, Display
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