Information
Clemens-Winkler-Straße 6c, 09116 Chemnitz, Germany
+49 371 33561200
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Overview
- Summary
- scia Systems is a German company that develops and manufactures precision surface processing equipment based on advanced ion beam and plasma technologies, achieving nanometer-level accuracy. The company provides coating, etching, and cleaning solutions to customers and research institutions primarily in the microelectronics, MEMS, and precision optics manufacturing sectors.scia Systems is a German company that develops and manufactures precision surface processing equipment based on advanced ion beam and plasma technologies, achieving nanometer-level accuracy. The company provides coating, etching, and cleaning solutions to customers and research institutions primarily in the microelectronics, MEMS, and precision optics manufacturing sectors.
- Key Products/Technologies
- Ion Beam Etching Systems include models such as scia Mill 150, scia Mill 200, and scia Mill 300, utilizing inert, reactive, and chemically assisted etching technologies for complex multilayer structures and microchip patterning.Ion Beam Etching Systems include models such as scia Mill 150, scia Mill 200, and scia Mill 300, utilizing inert, reactive, and chemically assisted etching technologies for complex multilayer structures and microchip patterning.
- Ion Beam Trimming Systems, including scia Trim 200, scia Trim 300, and scia Finish 1500 models, are specialized solutions for precise surface correction of wafers, improving thin film thickness uniformity, and correcting form errors on large optical substrates.Ion Beam Trimming Systems, including scia Trim 200, scia Trim 300, and scia Finish 1500 models, are specialized solutions for precise surface correction of wafers, improving thin film thickness uniformity, and correcting form errors on large optical substrates.
- Ion Beam Sputtering Systems, such as scia Coat 200, scia Coat 500, and scia Opto 300, are PVD technology-based equipment for depositing dense, uniform, and defect-free thin films.Ion Beam Sputtering Systems, such as scia Coat 200, scia Coat 500, and scia Opto 300, are PVD technology-based equipment for depositing dense, uniform, and defect-free thin films.
- Magnetron Sputtering Systems, including scia Multi 300, scia Multi 680, scia Multi 1500, and scia Magna 200, support alloy and reactive sputtering with single or multiple magnetron configurations for coating applications.Magnetron Sputtering Systems, including scia Multi 300, scia Multi 680, scia Multi 1500, and scia Magna 200, support alloy and reactive sputtering with single or multiple magnetron configurations for coating applications.
- The dry cleaning system, scia Clean 800, is a high-quality cleaning solution that removes surface contaminations from substrates through vacuum desorption, thermal desorption, and plasma treatment in an ultra-high vacuum environment.The dry cleaning system, scia Clean 800, is a high-quality cleaning solution that removes surface contaminations from substrates through vacuum desorption, thermal desorption, and plasma treatment in an ultra-high vacuum environment.
- Cluster Systems, like the scia Cluster 200, represent flexible, modular platforms that integrate multiple process chambers to increase throughput or combine various process technologies.Cluster Systems, like the scia Cluster 200, represent flexible, modular platforms that integrate multiple process chambers to increase throughput or combine various process technologies.
- The Electron Beam Evaporation System, scia Eva 200, is equipment that uses glancing angle deposition technology to form precise nanostructures on 200mm wafers.The Electron Beam Evaporation System, scia Eva 200, is equipment that uses glancing angle deposition technology to form precise nanostructures on 200mm wafers.
- The company's comprehensive technology portfolio includes Ion Beam Etching, Ion Beam Trimming, Ion Beam Sputtering, Plasma Enhanced Chemical Vapor Deposition, Reactive Ion Etching, Magnetron Sputtering, Electron Beam Evaporation, and Dry Cleaning.The company's comprehensive technology portfolio includes Ion Beam Etching, Ion Beam Trimming, Ion Beam Sputtering, Plasma Enhanced Chemical Vapor Deposition, Reactive Ion Etching, Magnetron Sputtering, Electron Beam Evaporation, and Dry Cleaning.
- Core Advantages
- Nanometer-level precision in surface processing technology, demonstrating high accuracy in coating, etching, and cleaning processes.Nanometer-level precision in surface processing technology, demonstrating high accuracy in coating, etching, and cleaning processes.
- Leadership in advanced ion beam and plasma technology, pioneering innovation in thin-film processing since its establishment in 2013.Leadership in advanced ion beam and plasma technology, pioneering innovation in thin-film processing since its establishment in 2013.
- Modular and flexible system design capable of custom configuration into standalone, cluster, or in-line solutions to meet diverse customer needs from R&D to high-volume production.Modular and flexible system design capable of custom configuration into standalone, cluster, or in-line solutions to meet diverse customer needs from R&D to high-volume production.
- Applicability to a wide range of materials including metals, semiconductors, polymers, and ceramics, providing optimized solutions across various industries such as MEMS, microelectronics, precision optics, and biomedical technology.Applicability to a wide range of materials including metals, semiconductors, polymers, and ceramics, providing optimized solutions across various industries such as MEMS, microelectronics, precision optics, and biomedical technology.
- Provision of highly reliable, flexible, and high-performance equipment that meets customer expectations and aligns with future roadmap requirements.Provision of highly reliable, flexible, and high-performance equipment that meets customer expectations and aligns with future roadmap requirements.
- A global service capability with a worldwide network of local sales and service partners, ensuring optimal and individualized customer support.A global service capability with a worldwide network of local sales and service partners, ensuring optimal and individualized customer support.
- Economic benefits through innovative cluster solutions like the scia Cluster 200, which reduce total cost of ownership (TCO) by optimizing footprint, utility consumption, and logistics compared to single-chamber systems.Economic benefits through innovative cluster solutions like the scia Cluster 200, which reduce total cost of ownership (TCO) by optimizing footprint, utility consumption, and logistics compared to single-chamber systems.
- Target Industries
- Microelectronics manufacturing industryMicroelectronics manufacturing industry
- MEMS (Micro-Electro-Mechanical Systems) manufacturing industryMEMS (Micro-Electro-Mechanical Systems) manufacturing industry
- Precision optics component manufacturing industryPrecision optics component manufacturing industry
- Research and development institutionsResearch and development institutions
- Astronomy and biomedical technology sectorsAstronomy and biomedical technology sectors
- Advanced semiconductor packaging and failure analysis (FA) fieldsAdvanced semiconductor packaging and failure analysis (FA) fields
- Sensor (GMR, TMR, infrared) manufacturing and acousto-electrical device (BAW/SAW filter) manufacturing industriesSensor (GMR, TMR, infrared) manufacturing and acousto-electrical device (BAW/SAW filter) manufacturing industries
- Augmented Reality (AR) and Mixed Reality (MR) device development fieldsAugmented Reality (AR) and Mixed Reality (MR) device development fields
- Major Markets
- South KoreaSouth Korea
- Germany, France, United KingdomGermany, France, United Kingdom
- United States, CanadaUnited States, Canada
- Certifications/Patents
- Received a Supplier Excellence Award from Qorvo for quality, on-time delivery, and support.Received a Supplier Excellence Award from Qorvo for quality, on-time delivery, and support.
- A member of EFDS (European Society of Thin Films), SEMI (Industry Association for Semiconductor Equipment and Materials International), and EPIC (European Photonics Industry Consortium).A member of EFDS (European Society of Thin Films), SEMI (Industry Association for Semiconductor Equipment and Materials International), and EPIC (European Photonics Industry Consortium).
- Leading capabilities in advanced ion beam and plasma technologies for nanometer-resolution coating, etching, and cleaning processes.Leading capabilities in advanced ion beam and plasma technologies for nanometer-resolution coating, etching, and cleaning processes.
- A technology leader in thin-film process equipment, with capabilities in developing reliable, flexible, and high-performance machinery.A technology leader in thin-film process equipment, with capabilities in developing reliable, flexible, and high-performance machinery.
Introduction
Location
Clemens-Winkler-Straße 6c, 09116 Chemnitz, Germany
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