Saeron Technology
Saeron Technology
Description
Product Description
The intended use of the probe-station SMARPROBE is the positioning of probes to analyze or manipulate samples fixed onto its sample stage. The system can be used for atmospheric probing of large samples up to nano-probing of the latest semi-conductor technologies within an electron microscope. If the intended use is nano-probing it is recommended to choose the SMARPROBE LX with an active temperature control for low thermal drift (L) and/or with an extended scan range for vibration free fine-positioning (X). Typical applications of the SMARPROBE are:
Specifications
| GENERAL SPECIFICATIONS | |||
| Operating Environment | HV (10-7 mbar), Ambient Conditions | Plasma Cleaning | Plasma Cleaning |
| Numbers of Manipulators | Up to 8 | Coarse Driving Principle | Piezo Stick-Slip |
| Fine Driving Principle¹ | Piezo Scanner | Relative Drift between Probe and Sample | >1,< 1 for L Extension |
| Max. Probing Area [mm] | 25×25 | Max. Sample Size [mm] | 25×25, larger size will reduce the probing area |
| Min. SEM Working Distance [mm] | 1 for 10×10 Samples 2 for 25×25 Samples |
Base Materials | Aluminum/Titan |
| Dimensions Nanoprober, W x L x H [mm] | 187 x 187 x 56 for 5-8 Manipulators (SP8) 156 x 156 x 56 for 2-4 Manipulators (SP4) |
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Komachine Inc.
Head Office:
Ace Dongbaek Tower 1-1101, 16-4,
Dongbaekjungang-ro 16beon-gil, Giheung-gu,
Yongin City, Gyeonggido, South Korea 17015
Branch Office:
606, Seoul Stratup Center, 10,
Noryangjin-ro, Dongjak-gu, Seoul, South Korea 06938
CEOCharlie Park
Corporate #535-86-00664
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