



Inspection machine manufacturer, Non contact thin film thickness gauge, Equipment for cell phone lens, AF module and more
| Item | Specification | Ref. | |
|---|---|---|---|
| Max. Measuring Range | 1300m X 1500 mm | OLED Glass Criteria | |
| Auto measure function | Yes | ||
| X, Y Axis | Position Accuracy | 3 + L/250 ㎛ | L : Measure length (mm) |
| Repeatability | ±1.0㎛ | ||
| Resolution | 0.1㎛ | ||
| Z Axis | Repeatability | ±1㎛ | |
| Resolution | 0.5㎛ | ||
| 3D | Measure Range | 300㎛ | |
| Resolution |
±0.5㎛ |
||
| 2D | Peculiarity | Auto Focusing Function | |
| Line Width Repeat Measure Accuracy | ±1㎛ | ||















