Information
214 Saneop-ro 155beon-gil, Gwonseon-gu, Suwon, Gyeonggi-do, South Korea
+82 31-612-7699
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Overview
- Summary
- A specialized company supplying RF power devices, matchers, and remote plasma systems, which are core components for semiconductor and display process equipment.A specialized company supplying RF power devices, matchers, and remote plasma systems, which are core components for semiconductor and display process equipment.
- Key Products/Technologies
- Remote Plasma Generator (RPG/RPS): A key module for removing residual foreign substances within the chamber during semiconductor and FPD (Flat Panel Display) CVD processes. An essential system for removing by-products after thin film, deposition, and etching processes. This product holds the #1 market share in Korea and #2 globally.Remote Plasma Generator (RPG/RPS): A key module for removing residual foreign substances within the chamber during semiconductor and FPD (Flat Panel Display) CVD processes. An essential system for removing by-products after thin film, deposition, and etching processes. This product holds the #1 market share in Korea and #2 globally.
- RF Generator (RFS): A device supplying high-frequency power necessary for plasma generation. A product line expanding its business from display equipment to the semiconductor sector. Possessing technological capabilities to meet the demand for high-efficiency and high-reliability RF control solutions.RF Generator (RFS): A device supplying high-frequency power necessary for plasma generation. A product line expanding its business from display equipment to the semiconductor sector. Possessing technological capabilities to meet the demand for high-efficiency and high-reliability RF control solutions.
- Matcher: A component that minimizes the loss of RF Power generated by the RF Generator and efficiently transmits it to the process chamber. This plays a crucial role in enhancing the stability and efficiency of plasma processes.Matcher: A component that minimizes the loss of RF Power generated by the RF Generator and efficiently transmits it to the process chamber. This plays a crucial role in enhancing the stability and efficiency of plasma processes.
- Plasma Pretreatment System (PPS): A process by-product treatment system applicable not only to the upper layer of the chamber but also to the exhaust pumps in the lower layer during all semiconductor and display processes. An innovative product effective in treating environmentally regulated substances and preventing vacuum pump degradation.Plasma Pretreatment System (PPS): A process by-product treatment system applicable not only to the upper layer of the chamber but also to the exhaust pumps in the lower layer during all semiconductor and display processes. An innovative product effective in treating environmentally regulated substances and preventing vacuum pump degradation.
- Core Advantages
- Leadership in Plasma Core Technology: A technology-leading company, being the second in the world to develop the Remote Plasma Generator in 2002. Recognized as the top domestic supplier of core plasma modules for semiconductor and display processes.Leadership in Plasma Core Technology: A technology-leading company, being the second in the world to develop the Remote Plasma Generator in 2002. Recognized as the top domestic supplier of core plasma modules for semiconductor and display processes.
- Diversified Product Portfolio: Expansion of product lines from cleaning-용 RPS to process-용 RPS and RFS, along with the development of new products like the Plasma Pretreatment System (PPS), demonstrating portfolio diversification. Capability to provide total plasma solutions in response to increasing demands for semiconductor miniaturization and etching processes.Diversified Product Portfolio: Expansion of product lines from cleaning-용 RPS to process-용 RPS and RFS, along with the development of new products like the Plasma Pretreatment System (PPS), demonstrating portfolio diversification. Capability to provide total plasma solutions in response to increasing demands for semiconductor miniaturization and etching processes.
- Global Market Competitiveness and Customer Expansion: Product sales in overseas markets including China and Taiwan. Efforts to secure new global clients, including in the US, and strong overseas sales contributing to increased revenue. A strategic goal to secure all global Big3 equipment companies as clients.Global Market Competitiveness and Customer Expansion: Product sales in overseas markets including China and Taiwan. Efforts to secure new global clients, including in the US, and strong overseas sales contributing to increased revenue. A strategic goal to secure all global Big3 equipment companies as clients.
- Continuous R&D and Intellectual Property: Possession of numerous intellectual property rights, including over 300 domestic patents and 28 overseas patents as of 2024. Ongoing R&D focused on digitalized product improvements for the semiconductor market and a mid-to-long-term technology development roadmap for Fin/FET, 7nm-class, ALD, and W-ALD.Continuous R&D and Intellectual Property: Possession of numerous intellectual property rights, including over 300 domestic patents and 28 overseas patents as of 2024. Ongoing R&D focused on digitalized product improvements for the semiconductor market and a mid-to-long-term technology development roadmap for Fin/FET, 7nm-class, ALD, and W-ALD.
- Export Achievements and Awards: Consecutive awards of the '50 Million Dollar Export Tower' in 2024 and the '70 Million Dollar Export Tower' in 2025. Increased export proportion through diversification of domestic and international clients and expanded demand for all products.Export Achievements and Awards: Consecutive awards of the '50 Million Dollar Export Tower' in 2024 and the '70 Million Dollar Export Tower' in 2025. Increased export proportion through diversification of domestic and international clients and expanded demand for all products.
- Target Industrie
- Semiconductor Industry: Various processes in semiconductor manufacturing, including Dry Etch, Thin Film, Diffusion, CVD, and PR strip. Application in deposition chamber cleaning and treatment of environmentally regulated substances.Semiconductor Industry: Various processes in semiconductor manufacturing, including Dry Etch, Thin Film, Diffusion, CVD, and PR strip. Application in deposition chamber cleaning and treatment of environmentally regulated substances.
- Display Industry: Supply of core components for FPD, LCD, and OLED display thin film and etching process equipment.Display Industry: Supply of core components for FPD, LCD, and OLED display thin film and etching process equipment.
- Other: Defense sector (revenue generated through affiliated companies).Other: Defense sector (revenue generated through affiliated companies).
- Major Markets
- South Korea (domestic market), China, TaiwanSouth Korea (domestic market), China, Taiwan
- USA and other new global clientsUSA and other new global clients
- Certifications/Patents
- Patents: As of 2024, possession of intellectual property rights including 304 domestic patents, 28 overseas patents, 31 domestic applications, and 7 overseas applications. Registration of various plasma-related technology patents, such as plasma reaction devices and resonant networks for plasma power supplies.Patents: As of 2024, possession of intellectual property rights including 304 domestic patents, 28 overseas patents, 31 domestic applications, and 7 overseas applications. Registration of various plasma-related technology patents, such as plasma reaction devices and resonant networks for plasma power supplies.
- Certifications: Holding ISO 9001 (Quality Management System), ISO 14001 (Environmental Management System), and ISO 27001 (Information Security Management System) certifications.Certifications: Holding ISO 9001 (Quality Management System), ISO 14001 (Environmental Management System), and ISO 27001 (Information Security Management System) certifications.
- Awards: Awarded the '70 Million Dollar Export Tower' in 2025. Received the '50 Million Dollar Export Tower' in 2024. Selected as one of Korea's Top 10 New Technologies in 2004 and certified as a Next-Generation World-Class Product (Remote Plasma Cleaner). Awarded the Prime Minister's Award for New Technology Commercialization in 2005.Awards: Awarded the '70 Million Dollar Export Tower' in 2025. Received the '50 Million Dollar Export Tower' in 2024. Selected as one of Korea's Top 10 New Technologies in 2004 and certified as a Next-Generation World-Class Product (Remote Plasma Cleaner). Awarded the Prime Minister's Award for New Technology Commercialization in 2005.
Introduction
Location
214 Saneop-ro 155beon-gil, Gwonseon-gu, Suwon, Gyeonggi-do, South Korea
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