Information
750 Gokhyeon-ro, Mohyeon-eup, Cheoin-gu, Yongin-si, Gyeonggi-do, South Korea
+82 31-337-1860
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Overview
- Summary
- A specialized company providing by-product trapping devices, real-time gas analysis systems, and environmental control equipment for enhancing efficiency and safety in semiconductor manufacturing processesA specialized company providing by-product trapping devices, real-time gas analysis systems, and environmental control equipment for enhancing efficiency and safety in semiconductor manufacturing processes
- Key Products/Technologies
- Provision of various types of traps and controllers for capturing by-products from semiconductor production equipment, extending vacuum pump lifetimeProvision of various types of traps and controllers for capturing by-products from semiconductor production equipment, extending vacuum pump lifetime
- Inclusion of customized solutions for specific processes, such as TiCl4 traps, W traps, ACL traps, Etch traps, Cold traps, Noa traps, and Heating trapsInclusion of customized solutions for specific processes, such as TiCl4 traps, W traps, ACL traps, Etch traps, Cold traps, Noa traps, and Heating traps
- Etch traps featuring a PM cycle of over 12 months, a Sheath Type heater with an operating temperature of 150℃~300℃, a 1-channel controller, and a safety interlock systemEtch traps featuring a PM cycle of over 12 months, a Sheath Type heater with an operating temperature of 150℃~300℃, a 1-channel controller, and a safety interlock system
- TiCl4 ALD/TiN Non-Stop traps offering high efficiency, customization, easy exchange, and a PM cycle exceeding 6 monthsTiCl4 ALD/TiN Non-Stop traps offering high efficiency, customization, easy exchange, and a PM cycle exceeding 6 months
- Real-time analysis of specific gas concentrations and prevention of safety accidents through an O2 TDL Analyzer System for improved cleaning efficiency inside process chambersReal-time analysis of specific gas concentrations and prevention of safety accidents through an O2 TDL Analyzer System for improved cleaning efficiency inside process chambers
- This system represents a technology for precise monitoring of gas concentrations generated during ongoing processesThis system represents a technology for precise monitoring of gas concentrations generated during ongoing processes
- Provision of heater blocks and control controllers for compensating cleaning gas temperatureProvision of heater blocks and control controllers for compensating cleaning gas temperature
- Controllers supporting 1 to 4 channels, including a safety interlock systemControllers supporting 1 to 4 channels, including a safety interlock system
- Provision of an ADS (Advanced Data Security) system contributing to efficient operation and cost reduction for customer equipmentProvision of an ADS (Advanced Data Security) system contributing to efficient operation and cost reduction for customer equipment
- Provision of repair services for semiconductor equipment parts, including traps, heaters, and motorsProvision of repair services for semiconductor equipment parts, including traps, heaters, and motors
- Core Advantages
- High efficiency and customized manufacturing capabilities for semiconductor process by-product trapping devicesHigh efficiency and customized manufacturing capabilities for semiconductor process by-product trapping devices
- Extended PM cycles, such as over 12 months for Etch traps and over 6 months for TiCl4 ALD/TiN Non-Stop traps, maximizing equipment uptimeExtended PM cycles, such as over 12 months for Etch traps and over 6 months for TiCl4 ALD/TiN Non-Stop traps, maximizing equipment uptime
- Real-time gas concentration analysis and safety accident prevention functions utilizing O2 TDL DetectorsReal-time gas concentration analysis and safety accident prevention functions utilizing O2 TDL Detectors
- Technology for minimizing process downtime during trap replacement through a bypass-type structureTechnology for minimizing process downtime during trap replacement through a bypass-type structure
- Goal of contributing to the global semiconductor market through localization of semiconductor equipment and partsGoal of contributing to the global semiconductor market through localization of semiconductor equipment and parts
- Capability to provide customized solutions based on accumulated technology and know-how in the semiconductor parts processing sectorCapability to provide customized solutions based on accumulated technology and know-how in the semiconductor parts processing sector
- Target Industrie
- Semiconductor manufacturing industrySemiconductor manufacturing industry
- Semiconductor production equipment by-product management and environmental control sectorsSemiconductor production equipment by-product management and environmental control sectors
- Enhancement of cleaning efficiency inside semiconductor process chambersEnhancement of cleaning efficiency inside semiconductor process chambers
- Major Markets
- Certifications/Patents
- Possession of a patent related to bypass-type semiconductor manufacturing by-product trapping devices (KR102672167B1)Possession of a patent related to bypass-type semiconductor manufacturing by-product trapping devices (KR102672167B1)
- Acquisition of CE certification for Etch Trap controllersAcquisition of CE certification for Etch Trap controllers
- Explicit mention of a 'Certification & Patent' section on the company's websiteExplicit mention of a 'Certification & Patent' section on the company's website
Introduction
Location
750 Gokhyeon-ro, Mohyeon-eup, Cheoin-gu, Yongin-si, Gyeonggi-do, South Korea
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