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KOWEL

KOWEL

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Model

Series

Dry Vacuum Pump


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Shipment

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Origin

Korea (Republic of)


Description

Features
· High reliability proved in various of industry field
· Optimized screw rotor and shorter gas pass
· Water cooled type motor 
  - Adopted Water cooled type motor and solved the main problem of air cooled type motor which had noise and solved the problem of flying the dust in all directions well.
 · Easy to move and work
   - Easy to move and work with portable type
   - Easy to operate with the separation type of control panel, easy to stick to the controller on all positions and available to operate on the remote.
 · Soundproofing panel
   - Available to use indoors by reducing the noise and adopting the visual design panel.
   - Certified quality and reliability in the field of flat display and semi-conductor
 · Small and economical vacuum pump
 · Small Footprint and easy operation
 · Improved displacement
 
 
 
Advantages to the Users
 

Available to choose the suitable pump from the range (50 ~ 5000 m3/hr)
Air cooled type pump - SE50, SE80 
 Simple structure and compact design of the pump
 · Low unit cost
 · Minimized installation
 · Short gas path to discharge (High speed of discharge)
 Structure of screw type rotor and one stage 
 · Higher volume efficiency
 · Lower noise and vibration
 Low operation cost - Low power consumption
 · Small amount of cooling water supply 
 Low maintenance cost 
 · More simple structure than the pump with multi-stage
 · Minimized repairing time and cost. 
 Improved pump's life and low maintenance cost
 
 
Application
 
 
· OLED
 · LiPB
 · Ultrasonic Cleaning/Plasma Cleaning
 · Heat Treatment Furnace
 · Electric, Electronics & all Semiconductor Process 
   Load-lock & transfer chamber pumping
   Backing a turbo pump on all processes
   CVD, PVD, Etching, Ion implantation etc.
   The clean & harsh chemistries used in all semiconductor applications
   Vacuum Packaging Process (PDP)  
 

 

Guide of Pump SelectionNeovac seires
ApplicationAir Evacuation 
Load lock/Transfer/Buffer
Chamber evacuation
 
Sputtering Deposition 
Ion implantation 
Ashing 
Etching ProcessMetal 
 Oxide 
 Nitride 
CVD ProcessNitride 
 Oxide 
 Nitride 
Epitaxial Process 

 

 

ItemsSS120SS200SS300SS600W
ModelMech, Booster---SSB600
Dry V/PSS120SS200SS300S120
Nominal Displacement 60Hz(50Hz),㎥/Hr120(100)187(155)320(267)660(568)
Ultimate Pressure (Torr/Pa)0.0050.005/0.670.005/0.670.0007/0.093
Rotation 60Hz(50Hz),rpm3500(2900)3500(2900)3500(2900)3500(2900)
Noise, dB<65<65<65<65
Motor, KW447.58
Power Consumption, KW2.5353.2
N2 Purge, simClean0000
Harsh0~500~500~500~50
Cooling Water, l /min2273
Oil, l0.50.51.61.5
Port Size (Suction/Discharge)NW50/NW40NW50/NW40NW50/NW40ISO100/NW40
Weight(Pump Only), Kg140140300360
SIZE(L × W × H),mm---890×390×828

 

ItemsSS1200WSS1800WSS3000WSS5000W
ModelMech, BoosterSSB1200SSB1800SSB3000SSB5000
Dry V/PS120SS200KDPH800KDPH800
Nominal Displacement 60Hz(50Hz),㎥/Hr1200(1000)1800(1500)3000(2500)5000(4166)
Ultimate Pressure (Torr/Pa)0.0007/0.0930.0007/0.0930.0007/0.0930.0007/0.093
Rotation 60Hz(50Hz),rpm3500(2900)3500(2900)3500(3500)3500(3500)
Noise, dB<65<65<65<65
Motor, KW881552
Power Consumption, KW3.84.7--
N2 Purge, simClean0000
Harsh0~500~500~500~50
Cooling Water, l /min33.52.435
Oil, l1.52.22.210
Port Size (Suction/Discharge)ISO100/NW40ISO160/NW40ISO200/ISO63ISO320/ISO80
Weight(Pump Only), Kg3904809702100
SIZE(L × W × H),mm850×390×858940×520×10001270×590×11201270×590×1120



KOWEL  NEOVAC-Series

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Screw Type Dry Vacuum Pumps

Inquiry

KOMACHINE CO., LTD.
CEO  Charlie ParkCorporate #  553-86-00664
(Post 17015) 1101ho ,16-4, Dongbaekjungang-ro 16beon-gil, Giheung-gu, Yongin-si, Gyeonggi-do, Republic of Korea

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