Information
1-1 Samsungjeonja-ro, Hwaseong-si, Gyeonggi-do, South Korea
+82 31-227-7474
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Overview
- Summary
- HPSP is the world's sole supplier of high-pressure annealing and oxidation equipment crucial for advanced semiconductor manufacturing processes. The company provides solutions that significantly enhance semiconductor device performance and reliability through its proprietary high-pressure hydrogen annealing technology. HPSP serves as a key partner in the semiconductor roadmap, supplying essential equipment for the production of cutting-edge chips by leading global semiconductor manufacturers.HPSP is the world's sole supplier of high-pressure annealing and oxidation equipment crucial for advanced semiconductor manufacturing processes. The company provides solutions that significantly enhance semiconductor device performance and reliability through its proprietary high-pressure hydrogen annealing technology. HPSP serves as a key partner in the semiconductor roadmap, supplying essential equipment for the production of cutting-edge chips by leading global semiconductor manufacturers.
- Key Products/Technologies
- The main product lines include high-pressure hydrogen annealing (HPA) equipment and high-pressure oxidation (HPO) equipment for semiconductor front-end processes. A representative high-pressure hydrogen annealing equipment is the 'GENI-SYS' series.The main product lines include high-pressure hydrogen annealing (HPA) equipment and high-pressure oxidation (HPO) equipment for semiconductor front-end processes. A representative high-pressure hydrogen annealing equipment is the 'GENI-SYS' series.
- This equipment utilizes a technology that maintains 100% pure hydrogen concentration in an ultra-high pressure (up to 25 atm) environment for wafer heat treatment processes.This equipment utilizes a technology that maintains 100% pure hydrogen concentration in an ultra-high pressure (up to 25 atm) environment for wafer heat treatment processes.
- Compared to conventional high-temperature methods, it enables low-temperature processes (below 250-450°C), reducing wafer damage risk and thermal budget constraints.Compared to conventional high-temperature methods, it enables low-temperature processes (below 250-450°C), reducing wafer damage risk and thermal budget constraints.
- It effectively removes interface defects, improving transistor drive current by up to 10-15% and contributing to reduced leakage current and enhanced charge carrier mobility.It effectively removes interface defects, improving transistor drive current by up to 10-15% and contributing to reduced leakage current and enhanced charge carrier mobility.
- This solution is essential for sub-2-nanometer advanced processes and the proliferation of Gate-All-Around (GAA) structures.This solution is essential for sub-2-nanometer advanced processes and the proliferation of Gate-All-Around (GAA) structures.
- Core Advantages
- A monopolistic market position as the world's first and only commercial producer of high-pressure hydrogen annealing equipment.A monopolistic market position as the world's first and only commercial producer of high-pressure hydrogen annealing equipment.
- The sole equipment company responsible for the 'final process that completes performance' in semiconductor microfabrication.The sole equipment company responsible for the 'final process that completes performance' in semiconductor microfabrication.
- High entry barriers due to extensive device and process patents, including those for high-pressure resistant chambers, pressure and temperature control devices, and High-K dielectric manufacturing processes.High entry barriers due to extensive device and process patents, including those for high-pressure resistant chambers, pressure and temperature control devices, and High-K dielectric manufacturing processes.
- Deep integration into the mass production lines of major global semiconductor manufacturers, securing a process-internal position that is difficult for latecomers to replace.Deep integration into the mass production lines of major global semiconductor manufacturers, securing a process-internal position that is difficult for latecomers to replace.
- Customization capabilities and design know-how to meet diverse technical requirements of customers.Customization capabilities and design know-how to meet diverse technical requirements of customers.
- A track record of maintaining high profitability, with an operating profit margin of 52% in 2023.A track record of maintaining high profitability, with an operating profit margin of 52% in 2023.
- Establishment of a collaborative research system with IMEC in Belgium, providing a foundation for next-generation node technology verification and pilot order expansion.Establishment of a collaborative research system with IMEC in Belgium, providing a foundation for next-generation node technology verification and pilot order expansion.
- Recognition of its technology and growth potential through awards such as the 70 Million Dollar Export Tower in 2022 and the Next-Generation Enterprise Award at the 2023 Korea KOSDAQ Awards.Recognition of its technology and growth potential through awards such as the 70 Million Dollar Export Tower in 2022 and the Next-Generation Enterprise Award at the 2023 Korea KOSDAQ Awards.
- Target Industries
- Broad application across the entire semiconductor manufacturing industry.Broad application across the entire semiconductor manufacturing industry.
- Specifically, logic and foundry processes in the system semiconductor sector.Specifically, logic and foundry processes in the system semiconductor sector.
- Production processes for memory semiconductors, including DRAM and NAND flash.Production processes for memory semiconductors, including DRAM and NAND flash.
- Solutions for interface defect healing in response to increasing stacking layers in 3D NAND.Solutions for interface defect healing in response to increasing stacking layers in 3D NAND.
- Manufacturing processes for HBM4 (6th generation) memory used in AI accelerators.Manufacturing processes for HBM4 (6th generation) memory used in AI accelerators.
- Major Markets
- South Korea, Taiwan, Japan, ChinaSouth Korea, Taiwan, Japan, China
- United StatesUnited States
- Certifications/Patents
- Possession of over 30 patents related to high-pressure hydrogen annealing technology.Possession of over 30 patents related to high-pressure hydrogen annealing technology.
- Recognition of the originality, inventiveness, and validity of its core technology through victory in patent disputes with competitors at the Intellectual Property Tribunal.Recognition of the originality, inventiveness, and validity of its core technology through victory in patent disputes with competitors at the Intellectual Property Tribunal.
- Recipient of the Next-Generation Enterprise Award at the 15th Korea KOSDAQ Awards in 2023.Recipient of the Next-Generation Enterprise Award at the 15th Korea KOSDAQ Awards in 2023.
- Awarded the 70 Million Dollar Export Tower at the 59th Trade Day in 2022.Awarded the 70 Million Dollar Export Tower at the 59th Trade Day in 2022.
- Acquisition of global semiconductor process safety and quality certifications.Acquisition of global semiconductor process safety and quality certifications.
Introduction
Location
1-1 Samsungjeonja-ro, Hwaseong-si, Gyeonggi-do, South Korea
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