Two high-precision scanner has excellent speed and work at the same time. It is possible to expand the processing area in one axis stage management.

1um can be controlled in the following accuracy, It is convenient to the fixing of the material in the attachment of the vacuum bad.

In addition, as an option, a coaxial vision the accuracy of the time of attachment will be higher. With the exception of the load / unload the material, it is a fully automated machine. (Option: possible automation of all processes.

Specifications