Information
47 Dongtansandan 2-gil, Hwaseong-si, Gyeonggi-do, South Korea
+82 31-378-6920
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Overview
- Summary
- CYMECHS is a specialized Tool Automation company supplying essential equipment for semiconductor manufacturing, including EFEM, LPM (FOUP Opener), ATM Robots for EFEM, and Vacuum Robots integrated into Transfer Chambers. The company successfully localized semiconductor transfer modules (Cluster Tool Systems) in 2007, establishing itself as a leader in the domestic semiconductor equipment market. Through its 2020 merger with Cyborglab, a robotics specialist, CYMECHS has strengthened its technological competitiveness. It is the first company in Korea to successfully localize semiconductor wafer transfer equipment and robots, applying vacuum robots to mass production lines of global semiconductor manufacturers. The company maintains a near-monopoly market share in both front-end and back-end semiconductor wafer transfer equipment.CYMECHS is a specialized Tool Automation company supplying essential equipment for semiconductor manufacturing, including EFEM, LPM (FOUP Opener), ATM Robots for EFEM, and Vacuum Robots integrated into Transfer Chambers. The company successfully localized semiconductor transfer modules (Cluster Tool Systems) in 2007, establishing itself as a leader in the domestic semiconductor equipment market. Through its 2020 merger with Cyborglab, a robotics specialist, CYMECHS has strengthened its technological competitiveness. It is the first company in Korea to successfully localize semiconductor wafer transfer equipment and robots, applying vacuum robots to mass production lines of global semiconductor manufacturers. The company maintains a near-monopoly market share in both front-end and back-end semiconductor wafer transfer equipment.
- Key Products/Technologies
- EFEM (Equipment Front End Module): Equipment for transferring wafers from FOUPs (Front Opening Unified Pods) to vacuum transfer modules (TM) or subsequent process equipment. The PHOENIX Series features optimized footprint design, FFU RPM/differential pressure mode compatibility, and the ability to configure PM-use ELEC RACKs on top of the EFEM. Models include PHOENIX-P200 (2LPM), PHOENIX-P300 (3LPM, with LINEAR TRACK MODULE), PHOENIX-P400 (4LPM, with LINEAR TRACK MODULE), and PHOENIX-P300-450 (450mm, 2LPM, expandable to 3LPM). The EFEM Software, developed in-house using C# and C++ on a Windows platform, supports equipment operation and a graphical user interface.EFEM (Equipment Front End Module): Equipment for transferring wafers from FOUPs (Front Opening Unified Pods) to vacuum transfer modules (TM) or subsequent process equipment. The PHOENIX Series features optimized footprint design, FFU RPM/differential pressure mode compatibility, and the ability to configure PM-use ELEC RACKs on top of the EFEM. Models include PHOENIX-P200 (2LPM), PHOENIX-P300 (3LPM, with LINEAR TRACK MODULE), PHOENIX-P400 (4LPM, with LINEAR TRACK MODULE), and PHOENIX-P300-450 (450mm, 2LPM, expandable to 3LPM). The EFEM Software, developed in-house using C# and C++ on a Windows platform, supports equipment operation and a graphical user interface.
- LPM (Load Port Module, FOUP Opener): A module where FOUPs containing wafers are placed, responsible for opening and closing the FOUP door. N2 Purge LPM is equipment that replaces contaminated air inside semiconductor process equipment with N2 gas, preventing wafer contamination and improving yield.LPM (Load Port Module, FOUP Opener): A module where FOUPs containing wafers are placed, responsible for opening and closing the FOUP door. N2 Purge LPM is equipment that replaces contaminated air inside semiconductor process equipment with N2 gas, preventing wafer contamination and improving yield.
- ATM Robot (Atmospheric Transfer Module Robot): Robots operating at atmospheric pressure within the EFEM. QUADRA Series (Quadra Series) models QUADRA-QA-34,44 handle 200mm and 300mm wafers, feature single arm (3-axis) or dual arm (4-axis) configurations, S-curve motion, Z-stroke of 300mm/400mm, repeatability of <0.1mm (3σ), Vacuum grip, Edge grip, Passive end effector types, and utilize Servo motors with Absolute encoders.ATM Robot (Atmospheric Transfer Module Robot): Robots operating at atmospheric pressure within the EFEM. QUADRA Series (Quadra Series) models QUADRA-QA-34,44 handle 200mm and 300mm wafers, feature single arm (3-axis) or dual arm (4-axis) configurations, S-curve motion, Z-stroke of 300mm/400mm, repeatability of <0.1mm (3σ), Vacuum grip, Edge grip, Passive end effector types, and utilize Servo motors with Absolute encoders.
- Vacuum Robot (VTM Robot, Vacuum Transfer Module Robot): Robots designed for operation in vacuum environments. QUADRA Series (Quadra Series) models QUADRA-QV400, QV600 are for high vacuum environments, handle 200mm and 300mm wafers, feature dual arm (4-axis) or quad arm (6-axis) configurations, Z-stroke of 50mm/120mm, repeatability of <0.1mm (3σ), and utilize Servo motors with Absolute encoders.Vacuum Robot (VTM Robot, Vacuum Transfer Module Robot): Robots designed for operation in vacuum environments. QUADRA Series (Quadra Series) models QUADRA-QV400, QV600 are for high vacuum environments, handle 200mm and 300mm wafers, feature dual arm (4-axis) or quad arm (6-axis) configurations, Z-stroke of 50mm/120mm, repeatability of <0.1mm (3σ), and utilize Servo motors with Absolute encoders.
- Transfer Chamber (Cluster Tool System): A wafer transfer module that includes EFEM, LPM, ATM Robot, and Vacuum Robot. This is critical automation equipment for precise wafer transfer throughout the semiconductor manufacturing process.Transfer Chamber (Cluster Tool System): A wafer transfer module that includes EFEM, LPM, ATM Robot, and Vacuum Robot. This is critical automation equipment for precise wafer transfer throughout the semiconductor manufacturing process.
- Core Advantages
- Pioneering Localization of Semiconductor Wafer Transfer Equipment: The company possesses advanced technology, being the first in Korea to localize vacuum robots for semiconductors and apply them to mass production lines of global semiconductor manufacturers. It has established a unique position in the market by successfully localizing wafer transfer equipment and robots, which were previously highly dependent on imports.Pioneering Localization of Semiconductor Wafer Transfer Equipment: The company possesses advanced technology, being the first in Korea to localize vacuum robots for semiconductors and apply them to mass production lines of global semiconductor manufacturers. It has established a unique position in the market by successfully localizing wafer transfer equipment and robots, which were previously highly dependent on imports.
- Customer-Oriented Solutions and Rapid Responsiveness: High customer satisfaction is achieved through custom-made wafer transfer equipment tailored to customer requirements and prompt technical support. The company actively responds to the localization needs of major customers like Samsung Electronics and SK Hynix, expanding its market share.Customer-Oriented Solutions and Rapid Responsiveness: High customer satisfaction is achieved through custom-made wafer transfer equipment tailored to customer requirements and prompt technical support. The company actively responds to the localization needs of major customers like Samsung Electronics and SK Hynix, expanding its market share.
- Continuous R&D and Technological Innovation: CYMECHS consistently enhances its technological competitiveness through ongoing research and development of advanced equipment, such as N2 Purge LPM and N2 EFEM, optimized for fine processes. The company focuses on expanding wafer transfer equipment sales to address HBM back-end investment and developing next-generation equipment.Continuous R&D and Technological Innovation: CYMECHS consistently enhances its technological competitiveness through ongoing research and development of advanced equipment, such as N2 Purge LPM and N2 EFEM, optimized for fine processes. The company focuses on expanding wafer transfer equipment sales to address HBM back-end investment and developing next-generation equipment.
- Cost Competitiveness through Robot Technology Internalization: The company aims for supply chain stabilization and cost reduction by internalizing previously imported multi-joint ATM robots from Japan. The 2020 merger with Cyborglab, a robotics specialist, further strengthens its robot technology competitiveness and aims to improve profit margins.Cost Competitiveness through Robot Technology Internalization: The company aims for supply chain stabilization and cost reduction by internalizing previously imported multi-joint ATM robots from Japan. The 2020 merger with Cyborglab, a robotics specialist, further strengthens its robot technology competitiveness and aims to improve profit margins.
- Diversified Customer Portfolio and Market Expansion: Products are supplied to global semiconductor companies including Samsung Electronics, SK Hynix, TSMC, Micron, and Intel. By securing major front-end equipment manufacturers like SEMES, Wonik IPS, and AMAT, as well as key back-end equipment manufacturers such as Hanmi Semiconductor and ASMPT, the company has built a stable foundation for orders.Diversified Customer Portfolio and Market Expansion: Products are supplied to global semiconductor companies including Samsung Electronics, SK Hynix, TSMC, Micron, and Intel. By securing major front-end equipment manufacturers like SEMES, Wonik IPS, and AMAT, as well as key back-end equipment manufacturers such as Hanmi Semiconductor and ASMPT, the company has built a stable foundation for orders.
- Target Industrie
- Semiconductor Industry: Supply of automation equipment covering the entire semiconductor manufacturing process, including wafer transfer modules, robots, and chambers. It plays a crucial role, especially in the front-end and back-end wafer transfer equipment markets.Semiconductor Industry: Supply of automation equipment covering the entire semiconductor manufacturing process, including wafer transfer modules, robots, and chambers. It plays a crucial role, especially in the front-end and back-end wafer transfer equipment markets.
- Intelligent Robotics Industry: Through the merger with a robotics specialist, the company strengthens its intelligent robotics technology competitiveness and pursues expansion in related businesses.Intelligent Robotics Industry: Through the merger with a robotics specialist, the company strengthens its intelligent robotics technology competitiveness and pursues expansion in related businesses.
- Major Markets
- South Korea, Taiwan, China, Japan (Hitachi)South Korea, Taiwan, China, Japan (Hitachi)
- United States (Micron, Intel, Applied Materials)United States (Micron, Intel, Applied Materials)
- Certifications/Patents
- ISO 9001 Quality Management System Certification (2006)ISO 9001 Quality Management System Certification (2006)
- ISO 27001 Information Security Management System Certification (2015)ISO 27001 Information Security Management System Certification (2015)
- INNO-BIZ (Innovation Business) Certification (2009)INNO-BIZ (Innovation Business) Certification (2009)
- Specialized Parts and Materials Company Certification by the Ministry of Knowledge Economy (2009)Specialized Parts and Materials Company Certification by the Ministry of Knowledge Economy (2009)
- Designation as an Excellent Productivity Improvement Company by the Ministry of Knowledge Economy (2012)Designation as an Excellent Productivity Improvement Company by the Ministry of Knowledge Economy (2012)
- Domestic Patent: N2 Purge Nozzle with Leak Prevention Function for Semiconductor Process Components (2016)Domestic Patent: N2 Purge Nozzle with Leak Prevention Function for Semiconductor Process Components (2016)
- Domestic Patent: Load Port Alignment Measurement Device (2017)Domestic Patent: Load Port Alignment Measurement Device (2017)
- Domestic Patent: EFEM Manufacturing Process Method and EFEM Manufacturing Process Equipment (2017)Domestic Patent: EFEM Manufacturing Process Method and EFEM Manufacturing Process Equipment (2017)
- Domestic Patent: Load Port Module Manufacturing Process Method and Load Port Module Manufacturing Process Equipment (2017)Domestic Patent: Load Port Module Manufacturing Process Method and Load Port Module Manufacturing Process Equipment (2017)
- Technological Strengths: Development of 450mm large-diameter wafer transfer equipment (2013) and selection as a government project company for related technology (2008). Successful localization of the only semiconductor vacuum robot (High Vacuum Technology) in Korea (2007).Technological Strengths: Development of 450mm large-diameter wafer transfer equipment (2013) and selection as a government project company for related technology (2008). Successful localization of the only semiconductor vacuum robot (High Vacuum Technology) in Korea (2007).
Introduction
Location
47 Dongtansandan 2-gil, Hwaseong-si, Gyeonggi-do, South Korea
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