BLUE CORD
BLUE CORD
Description
300mm EFEM은 Track장비, Wet Etcher등 반도체 전공정 장비의 Wafer Loading & Unloading을 수행하는 장비입니다.
Specification
- 2~4 Load Port in Frong(Customized Product)
- Semi Standard Compliance
- Linear Track for Wafer Transfer Robot Traveling
- Easy Operating & Maintenance
- PIO Sensor & RFID Read/Write
- Enclose Structure
- Fastest cycle time(Hight throughput)
- Wafer Cooling
- Communications : SECS Ⅰ / SECS Ⅱ / GEM
Komachine Inc.
Head Office:
Ace Dongbaek Tower 1-1101, 16-4,
Dongbaekjungang-ro 16beon-gil, Giheung-gu,
Yongin City, Gyeonggido, South Korea 17015
Branch Office:
606, Seoul Stratup Center, 10,
Noryangjin-ro, Dongjak-gu, Seoul, South Korea 06938
CEOCharlie Park
Corporate #535-86-00664
ⓒ2024 Komachine Inc. All rights reserved.