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Product Name PE CVD
Model
Series Display Equipment
Catalog
Product Description

PE CVD

Plasma Enhanced Chemical Vapor Deposition

•3.5G, 4.5G, 5G, 5.5G, 6G, 7G, 8G, and 8.5G: supply completed; 
•11G: development completed

[KEY BENEFITS]

- Excellent film quality uniformity
- Low impurity control
- Temperature and gas spray control

[KEY APPLICATIONS]

- TFT (a-Si / SiN / SiO)
- Passivation (SiN /SiO) 
 

Products of Jusung Engineering Co. , Ltd.